Abstract: Provided is a method for manufacturing a floating structure of a MEMS. The method for manufacturing a floating structure of a microelectromechanical system (MEMS), comprising the steps of: a) forming a sacrificial layer including a thin layer pattern doped with impurities on a substrate; b) forming a support layer on the sacrificial layer; c) forming a structure to be floated on the support layer by using a subsequent process; d) forming an etch hole exposing both side portions of the thin layer pattern; and e) removing the sacrificial layer through the etch hole to form an air gap between the support layer and the substrate.

Abstract: Provided are a biomolecule detection device, a mobile phone for biomolecule detection, and a biomolecule detection method. The biomolecule detection device includes an electrophoresis unit comprising an electrophoretic gel filtering erythrocytes and leukocytes in blood and transferring proteins and DNAs in the blood, and at least one type of a probe biomolecule, immobilized in the electrophoretic gel, reacting with a target biomolecule; a conversion unit converting a result of a reaction between the target biomolecule and the probe biomolecule to an electrical signal; and a lead-out unit receiving, converting, and transmitting the electrical signal.

Abstract: Provided is a sensor for biological detection. The sensor for biological detection includes: a sensing unit including a light generator, an optical coupler, and an optical detector, the optical coupler dividing light incident from the light generator to project divided lights into a bio chip and a reference unit, respectively, and coupling the lights reflected from the respective bio chip and reference unit as one output light, and the optical detector detecting the output light, and the bio chip is independently separated from the sensing unit to be disposed on paths of lights divided by the optical coupler. The sensing unit has a composition of the Michelson interferometer.

Abstract: Provided are a programmable mask for promptly fabricating a biomolecule or polymer array having high density, an apparatus for fabricating a biomolecule or polymer array including the mask, and a method of fabricating a biomolecule or polymer array using the programmable mask.

Abstract: There is provided a surface plasmon resonance imaging sensor capable of performing absolute calibration comprising: a transparent substrate; a first prism and a second prism formed at one surface of the substrate and symmetrically positioned with reference to the center axis of the substrate; an optical system for providing light to the first and second prisms; and a light receiving part for detecting the light reflected from the substrate, wherein a surface plasmon resonance (SPR) angle change of an object to be measured by the first prism is measured, and a refractive index change on each pixel of the object is obtained as a two-dimensional difference image by the second prism.

Abstract: Provided are a biochip and a biomaterial detection apparatus. The biochip includes a substrate, a metal layer, and a dielectric layer. The substrate includes a surface having a plurality of acute parts which are formed by first and second inclined planes. The metal layer is formed on at least one of the first and second inclined planes. The dielectric layer is formed on the metal layer, and capture molecules specifically binding to target molecules which are marked with a fluorescent substance are immobilized to a surface of the dielectric layer.

Abstract: Provided is a biochip and an apparatus for detecting a biomaterial. The biochip includes a metal thin film on the surface of a substrate, restraining autofluorescence of the substrate, and a spacer on the metal thin film, having capture molecules immobilized on the surface of the spacer and specifically bound to target molecules. The spacer has a thickness controlled to enhance the strength of a fluorescence signal emitted from a fluorophore labeled with the target molecules and immobilized on the spacer by the specific binding between the capture molecule and the target molecule.

Abstract: Provided are a nanoparticle for detecting biomaterials and a biosensor by using the nanoparticle. The nanoparticle includes a metal nanostructure around which an electric field is induced by localized surface plasmon resonance when light is irradiated onto a surface of the metal nanostructure, a spacer covering the surface of the metal nanostructure, and capture molecules specifically reacting with fluorophore-labeled target molecules, and immobilized on a surface of the spacer.

Abstract: Provided are a microfluidic device and a microfluidic network formed by connecting such microfluidic devices. The microfluidic device can equalize the flow of multiple microfluids in a chamber in parallel to thereby have an equal flow rate when the microfluids transferred through different flow channels join in the chamber having a changing cross-sectional area. The microfluidic device includes: multiple flow channels formed between an upper substrate and a lower substrate to transfer the microfluids and including inlets for injecting the microfluids in one side and fluid stopping surfaces for stopping the flow of the microfluids in the other side; a pressure controlling flow channel for removing a pressure difference between the microfluids; a fluid converging part for converging the microfluids; and a chamber composed of hydrophilic surfaces and hydrophobic surfaces disposed alternately in a flow direction so that the microfluids join and flow in parallel and equal.

Abstract: Provided is a disease diagnosis apparatus and method for detecting a specific disease. The disease diagnosis chip, includes: a light sensing layer; a probe molecule fixed on the light sensing layer; and an electrode connected to the light sensing layer to detect an electric signal corresponding to photoelectric charges of the light sensing layer.

Abstract: Provided are a programmable mask for promptly fabricating a biomolecule or polymer array having high density, an apparatus for fabricating a biomolecule or polymer array including the mask, a method of fabricating a biomolecule or polymer array using the programmable mask and a photochemical synthesis apparatus.

Abstract: Provided is a disease diagnosis apparatus and method for detecting a specific disease. The disease diagnosis chip, includes: a light sensing layer; a probe molecule fixed on the light sensing layer; and an electrode connected to the light sensing layer to detect an electric signal corresponding to photoelectric charges of the light sensing layer.

Abstract: An affinity chromatography microdevice includes a top board and a bottom board. The top board includes an inlet and an outlet through which microfluid flows, and a reaction chamber for limiting the flow of the microfluid for reaction. The bottom board includes a microelectrode for independently controlling a micro-temperature, and a thermosensitive polymer matrix formed on the microelectrode. The thermosensitive polymer matrix is contracted or expanded according to temperature change.

Abstract: The present invention relates to a programmable mask used in a photolithography process for fabricating a biomolecule array and a method of fabricating a biomolecule array using the same and, more particularly, to a programmable mask which can increase a contrast ratio of transmittance versus shielding of light incident to a liquid crystal which constitutes each pixel by irradiating parallel ultraviolet (“UV”) light generated from an external parallel light exposure device to a certain cell and using a vertically aligned liquid crystal panel or an LC panel having no spacer, and a method of fabricating a biomolecule array using the same.

Abstract: Disclosed is to a device for exchanging minimum amount of the fluid only by using surface tension of the fluid instead of external force like a pump. According to the device, an additional pump and power supply is not needed, thereby the device can be small sized and portable, and not only manufacturing cost decreases and yield increases but the device is hardly out of order.

Abstract: Provided is a method for manufacturing a floating structure of a MEMS. The method for manufacturing a floating structure of a microelectromechanical system (MEMS), comprising the steps of: a) forming a sacrificial layer including a thin layer pattern doped with impurities on a substrate; b) forming a support layer on the sacrificial layer; c) forming a structure to be floated on the support layer by using a subsequent process; d) forming an etch hole exposing both side portions of the thin layer pattern; and e) removing the sacrificial layer through the etch hole to form an air gap between the support layer and the substrate.

Abstract: The present invention relates to a programmable mask used in a photolithography process for fabricating a biomolecule array and a method of fabricating a biomolecule array using the same and, more particularly, to a programmable mask which can increase a contrast ratio of transmittance versus shielding of light incident to a liquid crystal which constitutes each pixel by irradiating parallel ultraviolet (“UV”) light generated from an external parallel light exposure device to a certain cell and using a vertically aligned liquid crystal panel or an LC panel having no spacer, and a method of fabricating a biomolecule array using the same.

Abstract: Provided are a stamper fabricated by using an embossing master and a focusing grating coupler fabricated by using the stamper, which is applicable to a subminiature pickup head for a mobile optic disk, whereby it is possible to reduce a weight and a volume of the pickup head with a simple process and low cost and to apply for mass production.

Abstract: Provided is an apparatus for controlling fluid-heating using a polymer disk, which includes: a pump for discharging fluid at a uniform flow rate; a fluid-heating module including a polymer disk to convey the fluid discharged from the pump to allow a temperature of the fluid to periodically vary; and a controller for controlling the temperature of the fluid-heating module, whereby it is possible to be adapted to a fluid device for biochemical reaction such as DNA amplification, and simply used as a disposable device, which is low cost and readily manufactured in a multiple manner.

Abstract: Provided are a micro gas sensor for measuring a gas concentration configured to achieve a high heating and cooling rate of a gas sensitive layer, achieve temperature uniformity, and achieve durability against thermal impact and mechanical impact; and a method for manufacturing the micro gas sensor. The micro gas sensor includes: a vacuum cavity disposed in a substrate; a support layer covering the vacuum cavity; a sealing layer sealing the support layer and the vacuum cavity; a micro heater disposed on the sealing layer; a plurality of electrodes disposed on the micro heater, insulated from the micro heater; and a gas sensitive layer covering the electrodes.