Patents by Inventor Hyeon-Dong Shin

Hyeon-Dong Shin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma generating apparatus having antenna with impedance controller
    Patent number: 8181597
    Abstract: Provided is a plasma generating apparatus. The apparatus includes a vacuum chamber, an ElectroStatic Chuck (ESC), an antenna holder. The vacuum chamber has a hollow interior and is sealed at its top by a vacuum plate that has a through-hole at its center. The ESC is disposed at an internal center of the vacuum chamber. The antenna unit is disposed within the vacuum chamber under the vacuum plate. The antenna cover covers and is coupled to a top of the antenna unit and receives and forwards an external source RF to the antenna unit. The cover holder is caught by an upper surface of the vacuum plate and suspends and holds the antenna unit.
    Type: Grant
    Filed: April 18, 2008
    Date of Patent: May 22, 2012
    Assignee: Jehara Corporation
    Inventors: Hong-Seub Kim, Hyeon-Dong Shin
  • PLASMA GENERATING APPARATUS
    Publication number: 20100237777
    Abstract: Provided is a plasma generating apparatus. The apparatus includes a vacuum chamber, an ElectroStatic Chuck (ESC), an antenna holder. The vacuum chamber has a hollow interior and is sealed at its top a by a vacuum plate that has a through-hole at its center. The ESC is disposed at an internal center of the vacuum chamber. The antenna unit is disposed within the vacuum chamber under the vacuum plate. The antenna cover covers and is coupled to a top of the antenna unit and receives and forwards an external source RF to the antenna unit. The cover holder is caught by an upper surface of the vacuum plate and suspends and holds the antenna unit.
    Type: Application
    Filed: April 18, 2008
    Publication date: September 23, 2010
    Inventors: Hong-Seub Kim, Hyeon-Dong Shin