Abstract: The inventive concept relates to a substrate support unit provided in an apparatus for treating a substrate using plasma. In an embodiment, the substrate support unit includes a dielectric plate on which the substrate is placed, a lower electrode that is disposed under the dielectric plate and that has a first diameter, a power supply rod that applies RF power to the lower electrode and has a second diameter, and a ground member disposed under the lower electrode and spaced apart from the lower electrode by a first gap by an insulating member, the ground member including a plate portion having a through-hole formed therein through which the power supply rod passes, in which the through-hole has a third diameter.

Abstract: A vehicular heat management system includes a refrigerant circulation line configured to generate hot energy or cold energy depending on a flow direction of a refrigerant, a heater core side coolant circulation line configured to transfer refrigerant heat generated in the refrigerant circulation line to a heater core to heat a passenger compartment, and a battery side coolant circulation line configured to receive coolant heat of the heater core side coolant circulation line via a coolant and then circulate the coolant through a battery to preheat the battery.

Abstract: A vehicular heat management system includes: a refrigerant circulation line including a compressor, a high pressure side heat exchanger, an outdoor heat exchanger, a plurality of expansion valves arranged on the heat pump type refrigerant circulation line, and a low pressure side heat exchanger; and a control part configured to calculate an optimal control value by arithmetically processing real-time information on one or more factors affecting a temperature and a pressure of a refrigerant circulating along the refrigerant circulation line, through the use of a pre-stored calculation formula, and control at least one of the expansion valves based on the calculated optimal control value.

Abstract: A vehicular heat management system includes a refrigerant circulation line configured to generate hot energy or cold energy depending on a flow direction of a refrigerant, a heater core side coolant circulation line configured to transfer refrigerant heat generated in the refrigerant circulation line to a heater core to heat a passenger compartment, and a battery side coolant circulation line configured to receive coolant heat of the heater core side coolant circulation line via a coolant and then circulate the coolant through a battery to preheat the battery.

Abstract: A vehicular heat management system includes a refrigerant circulation line configured to generate hot energy or cold energy depending on a flow direction of a refrigerant, a heater core side coolant circulation line configured to transfer refrigerant heat generated in the refrigerant circulation line to a heater core to heat a passenger compartment, and a battery side coolant circulation line configured to receive coolant heat of the heater core side coolant circulation line via a coolant and then circulate the coolant through a battery to preheat the battery.

Abstract: A vehicular heat management system for individually cooling and heating a plurality of air conditioning regions of a vehicle includes a plurality of refrigerant circulation lines configured to cool and heat the air conditioning regions individually shared by the refrigerant circulation lines. The refrigerant circulation lines are provided with one or more air conditioning units for individually cooling and heating the respective air conditioning regions, and are configured to supply a refrigerant to the corresponding air conditioning units to individually cool and heat the air conditioning regions corresponding to the air conditioning units.

Abstract: A support unit provided in an apparatus for treating a substrate using plasma includes a dielectric plate on which the substrate is placed, an electrode plate disposed under the dielectric plate, a power supply rod that applies power to the electrode plate, and a flange that has a shape surrounding the power supply rod and that is spaced apart from the power supply rod.

Abstract: A vehicular heat management system includes a refrigerant circulation line configured to cool or heat a passenger compartment by generating a hot air or a cold air depending on a flow direction of a refrigerant, a cooling water circulation line configured to heat the passenger compartment with waste heat of an engine by allowing cooling water of the engine to circulate through a heater core, a refrigerant-cooling water heat exchanger disposed in the cooling water circulation line to allow the refrigerant and the cooling water to exchange heat, and an engine cooling water independent circulation unit configured to allow the cooling water passed through the engine to bypass the heater core and the refrigerant-cooling water heat exchanger.

Abstract: Provided is a support unit included in an apparatus for treating a substrate using plasma and configured to support the substrate. The support unit may include a power supply rod connected to a high-frequency power supply; an electrode plate configured to receive power from the power supply rod; and a ground ring provided to surround the electrode plate when viewed from the top and including a ground ring to be grounded.

Abstract: A vehicular heat management system for individually cooling and heating a plurality of air conditioning regions of a vehicle includes a plurality of refrigerant circulation lines configured to cool and heat the air conditioning regions individually shared by the refrigerant circulation lines. The refrigerant circulation lines are provided with one or more air conditioning units for individually cooling and heating the respective air conditioning regions, and are configured to supply a refrigerant to the corresponding air conditioning units to individually cool and heat the air conditioning regions corresponding to the air conditioning units.

Abstract: An integrated heat management system for a vehicle includes an air conditioner configured to cool or heat a passenger compartment using a refrigerant, a water-cooled cooling device configured to cool a specific device using the refrigerant of the air conditioner, and an air conditioning load change preventing unit configured to prevent a sudden change in an air conditioning load of the air conditioner when turning on or off the water-cooled cooling device with respect to the air conditioner.

Abstract: The inventive concept relates to a substrate support unit provided in an apparatus for treating a substrate using plasma. In an embodiment, the substrate support unit includes a dielectric plate on which the substrate is placed, a lower electrode that is disposed under the dielectric plate and that has a first diameter, a power supply rod that applies RF power to the lower electrode and has a second diameter, and a ground member disposed under the lower electrode and spaced apart from the lower electrode by a first gap by an insulating member, the ground member including a plate portion having a through-hole formed therein through which the power supply rod passes, in which the through-hole has a third diameter.

Abstract: An integrated heat management system for a vehicle includes a refrigerant circulation line configured to cool or heat a passenger compartment while operating in an air conditioner mode or a heat pump mode according to a flow direction of a refrigerant, an electric component module side cooling water circulation line configured to circulate the cooling water through the electric component module to cool the electric component module, a water-cooled outdoor heat exchanger configured to allow the refrigerant circulating through the refrigerant circulation line to exchange heat with the cooling water circulating through the electric component module side cooling water circulation line, and a cooling water flow control unit configured to control a cooling water flow in the electric component module side cooling water circulation line.

Abstract: Disclosed herein is an air conditioning system for a vehicle, in which an air conditioning unit having noise inducing unit is arranged at an engine room based on a dash panel and a distribution duct for distributing air to the interior of the vehicle is arranged in the interior of the vehicle based on the dash panel, thereby reducing noise and vibration in the interior of the vehicle, securing visibility and enabling a worker to easily access the air conditioning system for follow-up service because the air conditioning unit causing noise is arranged inside the engine room, and enhancing passengers' convenience by maximizing the interior space of the vehicle in comparison with the conventional air conditioning systems because only the distribution duct is arranged in the interior of the vehicle.

Abstract: The present invention relates to an air conditioner for a vehicle with a heat pump system structure, which has a simple piping structure and enhances heating performance, thereby reducing a package, and making common use with an air conditioner for an internal combustion engine possible.

Abstract: Provided is a shower head unit for control temperature for each area using a planar heating element and a substrate treating system having the same. The substrate treating system includes a housing, a shower head unit installed on an inner upper side of the housing and for entering a process gas for etching a substrate into the housing, and an electrostatic chuck installed on an inner lower side of the housing and for seating the substrate, wherein the shower head unit is installed as a planar heating element in a plurality of areas to control temperature for each area.

Abstract: A support unit provided in an apparatus for treating a substrate using plasma includes a dielectric plate on which the substrate is placed, an electrode plate disposed under the dielectric plate, a power supply rod that applies power to the electrode plate, and a flange that has a shape surrounding the power supply rod and that is spaced apart from the power supply rod.

Abstract: The temperature control device for a vehicle, heats the interior of the vehicle and a battery, and an air conditioner for a vehicle having the same. The battery temperature control device includes a refrigerant circulation line having a compressor, an indoor heat exchanger, expansion means and an outdoor heat exchanger; a coolant circulation line which circulates a heater core mounted to heat the interior of the vehicle; and a coolant heat exchanger mounted to exchange heat between refrigerant circulating the refrigerant circulation line and coolant circulating the coolant circulation line, wherein a battery is arranged on the coolant circulation line.

Abstract: An integrated heat management system for a vehicle includes a refrigerant circulation line configured to cool or heat a passenger compartment while operating in an air conditioner mode or a heat pump mode according to a flow direction of a refrigerant, an electric component module side cooling water circulation line configured to circulate the cooling water through the electric component module to cool the electric component module, a water-cooled outdoor heat exchanger configured to allow the refrigerant circulating through the refrigerant circulation line to exchange heat with the cooling water circulating through the electric component module side cooling water circulation line, and a cooling water flow control unit configured to control a cooling water flow in the electric component module side cooling water circulation line.

Abstract: The present invention relates to an air conditioning system for a vehicle and a method for controlling the same and, more specifically, to an air conditioning system for a vehicle and a method for controlling the same in which an opening/closing valve and an expansion valve are installed on a branch line connecting a first air conditioning unit and a second air conditioning unit, the opening/closing valve is always open so as to always supply a refrigerant to the second air conditioning unit during a cooling mode, and the opening/closing valve is always closed so as to always block the refrigerant supply to the second air conditioning unit during a heating mode, such that the refrigerant flows into the branch line of the second air conditioning unit even during a single cooling mode, thereby solving the problem wherein the pressure of a compressor increases, oil is forcibly circulated through a notch of the expansion valve, thereby solving the problem wherein the oil circulation rate decreases, and the refrig