Hyeonsu Cho has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
Abstract: An etchant including: persulfate; a fluorine-containing compound; a chlorine-containing compound; a cyclic amine compound; an inorganic acid; a first compound; and water, wherein the first compound is a compound containing: a sulfonic group, a sulfonic acid group, or a combination thereof; and an amine group, and an interfacial permeation inhibition index (Y) of the etchant is a value of at least about 0.10 and not more than about 0.35, the interfacial permeation inhibition index (Y) being a value calculated by Equation 1: Y=1.4×10?4×M(X1)+1.3×10?4×M(X2)+1.45×10?3×M(X3)+1.5×10?5×M(X1)×M(X2)+1.6×10?3M(X1)×M(X3)+6.5×10?4×M(X2)×M(X3)??Equation 1 The description of Equation 1 is as in the specification.
Type:
Application
Filed:
March 7, 2023
Publication date:
September 21, 2023
Inventors:
Shinhyuk Yang, Beomsoo Kim, Hyeonsu Cho, Jeehoon Kim, Youngjin Yoon, Eunwon Lee, Donghan Kang, Jihun Park, Jongmoo Huh
Abstract: An etchant including: persulfate; a fluorine-containing compound; a chlorine-containing compound; a cyclic amine compound; an inorganic acid; sulfate; and water, wherein a tip control index (Y) of the etchant is a value of at least about 45.0 and not more than about 70.0, the tip control index (Y) being a value calculated by Equation 1: Y=1.0×10?3×M(X1)+1.0×10?1×M(X2)+5.0×10?2×M(X3)+1.5×M(X1)×M(X2)+2.0×10?1×M(X1)×M(X3)+2.0×10?1×M(X2)×M(X3)??Equation 1 The description of Equation 1 is as in the specification.
Type:
Application
Filed:
February 15, 2023
Publication date:
September 21, 2023
Inventors:
Shinhyuk Yang, Beomsoo Kim, Hyeonsu Cho, Yujin Kim, Jeehoon Kim, Youngjin Yoon, Eunwon Lee, Donghan Kang