Patents by Inventor Hyeon Suk PARK

Hyeon Suk PARK has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chemical supply unit, substrate processing apparatus, and substrate processing method
    Patent number: 11684955
    Abstract: An apparatus for processing a substrate includes a housing having a processing space in which the substrate is processed, a support unit that supports the substrate in the processing space, a nozzle that dispenses a chemical onto the substrate placed on the support unit, a chemical supply unit that supplies the chemical to the nozzle, and a controller that controls the chemical supply unit.
    Type: Grant
    Filed: December 30, 2020
    Date of Patent: June 27, 2023
    Assignee: SEMES CO., LTD.
    Inventors: Tae Suk Yun, Hyeon Suk Park
  • CHEMICAL SUPPLY UNIT, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PROCESSING METHOD
    Publication number: 20210197237
    Abstract: An apparatus for processing a substrate includes a housing having a processing space in which the substrate is processed, a support unit that supports the substrate in the processing space, a nozzle that dispenses a chemical onto the substrate placed on the support unit, a chemical supply unit that supplies the chemical to the nozzle, and a controller that controls the chemical supply unit.
    Type: Application
    Filed: December 30, 2020
    Publication date: July 1, 2021
    Inventors: Tae Suk YUN, Hyeon Suk PARK