Patents by Inventor Hyeon Won JUNG

Hyeon Won JUNG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240021418
    Abstract: The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a housing having a treating space; a support unit configured to support a substate within the treating space; and a plasma source for generating a plasma by exciting a gas supplied to the treating space, and wherein the support unit includes: a chuck having the substrate mounted to a top surface thereof; and a ring member in a ring shape surrounding an outer side of the chuck, and the ring member includes a cut surface which divides the ring member and a holding member positioned at the cut surface which holds a position of the ring member which is divided by the cut surface.
    Type: Application
    Filed: July 14, 2023
    Publication date: January 18, 2024
    Applicant: PSK INC.
    Inventors: Kwang Sung YOO, Tae Hwan YOUN, Hyeon Won JUNG