Abstract: A dry gas scrubber is disclosed. The dry gas scrubber is for treatment of an effluent stream and comprises: a chamber having an inlet for receiving the effluent stream, a cooler coupled with the inlet and configured to cool the effluent stream, and a resin chamber downstream of the cooler and configured to receive the effluent stream for treatment. In this way, the cooler is interposed between the process tool and the resin chamber and operates to cool the effluent stream prior to its being delivered to the resin chamber. Cooling the effluent stream in this way helps to improve the performance of the resin, even when the effluent stream is at an elevated temperature.

Abstract: The present invention presents a scrubber burner composed of a preheating spray ring that is formed with a porous material with certain thickness, and that preheats and sprays the fuel gas in the preheating combustion space formed inside, a preheating guide ring equipped with multiple preheating guide holes that wrap the outer circumference of the aforementioned preheating spray ring, and that penetrates from the outer circumference to the inner circumference, and a preheating burner module equipped with a housing that forms a ring shaped gas channel that is separated from the outer circumference of the aforementioned preheating guide ring and through which the aforementioned fuel gas flows.

Abstract: An apparatus for a dry gas scrubber includes: a cooling chamber defined by a housing having an inlet for receiving an effluent stream for treatment by the dry gas scrubber, an outlet for providing the effluent stream for treatment by the dry gas scrubber, and at least one cooling plate within the chamber, the cooling plate being thermally coupled with the housing and configured to deviate a direction of flow of the effluent stream when flowing from the inlet to the outlet. In this way, the cooling chamber is interposed between the process tool and the resin chamber of the dry gas scrubber and operates to cool the effluent stream prior to its being delivered to the resin chamber. Cooling the effluent stream in this way helps to improve the performance of the resin, even when the effluent stream is at an elevated temperature.

Abstract: The present invention presents a burner for scrubbers equipped with the first nozzle that is in the shape of a pipe and that is equipped with the first main body, the second nozzle that is in the shape of a pipe and equipped with the second main body that is located to wrap the outer circumference of the aforementioned first main body, and the third nozzle that is in the shape of a pipe and that is equipped with the third main body located to wrap the outer circumference of the aforementioned second main body.