Patents by Inventor Hyeong Mo YOO

Hyeong Mo YOO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma detecting device
    Patent number: 11854774
    Abstract: Disclosed is a detection device which includes a measurement unit including an illumination sensor that measures an amount of light in an interior of a chamber, and a detection unit that detects whether plasma is generated in the interior of the chamber, through analysis of the amount of the light.
    Type: Grant
    Filed: August 17, 2021
    Date of Patent: December 26, 2023
    Assignee: PSK Holdings Inc.
    Inventors: Nam Young Kim, Hyeong Mo Yoo
  • PLASMA DETECTING DEVICE
    Publication number: 20220301836
    Abstract: Disclosed is a detection device which includes a measurement unit including an illumination sensor that measures an amount of light in an interior of a chamber, and a detection unit that detects whether plasma is generated in the interior of the chamber, through analysis of the amount of the light.
    Type: Application
    Filed: August 17, 2021
    Publication date: September 22, 2022
    Applicant: PSK Holdings Inc.
    Inventors: Nam Young KIM, Hyeong Mo YOO