Abstract: Provided is a semiconductor inspection device. The semiconductor inspection device includes a laser light source configured to generate a laser beam that is scanned onto a semiconductor substrate, a first optical system spaced apart from a top surface of the semiconductor substrate in a vertical direction and configured to concentrate the laser beam on a confocal point, a semiconductor substrate stage arranged on one side of the semiconductor substrate and configured to move the semiconductor substrate in the vertical direction, a detector configured to measure a Raman signal from the laser beam scattered from the semiconductor substrate, and a controller configured to calculate a Raman spectrum through the Raman signal measured from the detector and pieces of peak signal data of amorphous silicon and crystalline silicon included in channel layers from the Raman spectrum and measure a degree of crystallinity based on a depth of the semiconductor substrate.

Abstract: In a substrate inspection method, a substrate is provided on a substrate stage, the substrate having internal wires and connection wires, the internal wires respectively provided between stacked insulating layers, the connection wires respectively extending from the internal wires and exposed to an upper surface of the substrate. An electric circuit of the internal wires in the substrate is modeled to generate a circuit model. AC power is applied to the substrate stage to obtain measured capacitance values of the internal wires through currents that are obtained from the connection wires. DC power is applied to the substrate stage to obtain measured resistance values of the internal wires through voltages that are obtained from the connection wires. Impedance values of the internal wires are calculated through the measured capacitance values and the measured resistance values. The impedance values and the circuit model are compared to determine reliability of the substrate.

Abstract: A scanning electron microscope device includes an electron beam source emitting a plurality of electron beams travelling to an object mounted on a stage along a plurality of different travel paths, a plurality of detectors into which a plurality of signal beams emitted from the object by the plurality of electron beams are respectively incident, and a controller determining modulation characteristics of each of the plurality of electron beams and the number of the plurality of electron beams. The controller controls the electron beam source and the plurality of detectors so that two or more signal beams are incident on each of the plurality of detectors. The controller separates an individual signal corresponding to each of the two or more signal beams from an output signal of each of the plurality of detectors, and generates an image of a target area of the object emitting the plurality of signal beams.

Abstract: A method of generating a defect classification model includes preparing a sample wafer that has undergone at least one unit of a manufacturing process, capturing, using an electronic device, a plurality of primary images of different locations of the sample wafer, obtaining a plurality of secondary images based on the capturing of the plurality of primary images, detecting a plurality of defect images including a defect from among the plurality of primary images and the plurality of secondary images, classifying and labeling at least one of the plurality of defect images as defect data, and generating an automatic defect classification model based on the defect data.

Abstract: An optical imaging device includes a pulse generator including a pulse generating device configured to generate pulse lasers and a pulse expander configured to receive a pulse laser from the pulse generating device, and generate a broadened pulse laser by expanding a spectrum and width of the received pulse laser, an optical assembly including an objective lens configured to receive the broadened pulse laser and pass the received broadened pulse laser to a target object, and a light receiver including a light receiving device configured to receive a reflected pulse laser corresponding to the broadened pulse laser reflected from the target object and convert the reflected pulse laser into an electrical signal, and at least one processor configured to generate a spectral image set based on the electrical signal generated by the light receiving device.

Abstract: A substrate inspection method includes reducing a surface potential of a substrate; and increasing a difference of the surface potential of the substrate, where reducing the surface potential of the substrate includes: controlling a scanning electron microscope to irradiate an electron beam to the substrate for a first irradiation time; and after a first standby time has elapsed, controlling the scanning electron microscope to re-irradiate the electron beam to the substrate for the first irradiation time, where increasing the difference of the surface potential of the substrate includes: controlling the scanning electron microscope to irradiate the electron beam to the substrate for a second irradiation time; and after a second standby time has elapsed, controlling the scanning electron microscope to re-irradiate the electron beam to the substrate for the second irradiation time, and where the first irradiation time is less than the second irradiation time.

Abstract: In a substrate inspection method, a substrate is provided on a substrate stage, the substrate having internal wires and connection wires, the internal wires respectively provided between stacked insulating layers, the connection wires respectively extending from the internal wires and exposed to an upper surface of the substrate. An electric circuit of the internal wires in the substrate is modeled to generate a circuit model. AC power is applied to the substrate stage to obtain measured capacitance values of the internal wires through currents that are obtained from the connection wires. DC power is applied to the substrate stage to obtain measured resistance values of the internal wires through voltages that are obtained from the connection wires. Impedance values of the internal wires are calculated through the measured capacitance values and the measured resistance values. The impedance values and the circuit model are compared to determine reliability of the substrate.

Abstract: An apparatus for inspecting and measuring a semiconductor device includes a stage on which an object to be measured is provided, a detector configured to detect a spectral image from light reflected from the object to be measured, and a processor configured to generate a spectral matrix based on the spectral image detected by the detector, wherein detector includes a time delayed integration (TDI) sensor configured to detect the spectral image based on a TDI process.

Abstract: A vehicle drive control system comprising a primary driving system having a first power source for providing torque to a first set of one or more wheels and an auxiliary driving system having a second power source for providing torque to a second set of one or more wheels of the vehicle. The auxiliary driving control system is configured to apply torque to a second set of one or more wheels of the vehicle to arrest downhill movement of the vehicle.

Abstract: This invention describes a control method for a hydraulic coupling system that includes pressurizing a fluid in an actuator coupled to a multi-disk clutch pack to engage the clutch pack, pumping the fluid through the clutch pack to cool the clutch pack, and controlling one or more valve actuators and one or more pump-motors with a controller. The control method may incorporate pulse width modulation of the actuators, such as the actuators for the pump-motor and valve.

Abstract: A torque-biasing system (10) including a torque-biasing device (12) and a control unit (14) for use in a vehicle (16). The torque-biasing system is preferably installed and used in a vehicle having a first wheel (18) with a first rotational speed and a second wheel (20) with a second rotational speed, and an engine (22) with a torque output. The control unit (14) calculates an error value based on a different between the first rotational speed and second rotational speed and derives a control signal based upon proportional and integral terms of the error value with a forgetting factor. The control unit then sensor the control signal to the torque-biasing device (12).

Abstract: A torque-biasing system (10) includes a torque-biasing device (12) and a control unit (14) for use in a motor vehicle. The torque-biasing system is preferably installed in a vehicle having a first front wheel (18) with a first rotational speed and second wheel (20) with a rear rotational speed and an engine (22) with a torque output. The control unit (14) functions to determined when and how to bias the torque output of the front and rear wheels, and to control the torque-biasing device (12) based on this determination.

Abstract: A method and system for vehicle velocity estimation. The method and system effectively combine vehicle kinetic and kinematic models to determine the noise covariance or reliability of vehicle sensor signals, and vehicle approximated velocity. The vehicle approximated velocity, sensor signals, and noise covariances are used in conjunction with a Kalman filter to determine the estimated velocity of the vehicle. The noise covariance is calculated from the relationship between various sensor signals and calculated values by determining if the sensor signal and calculated values correspond to a vehicle operating state.

Abstract: A method for controlling a vehicle, the vehicle having a steer by wire and a brake by wire system is disclosed. The method includes sensing a yaw rate, a steering wheel rate of rotation, and a throttle position. Further, the method includes comparing the yaw rate, steering wheel rate of rotation, and the throttle position to a thresholds. Thereafter, a determination is made as to whether the yaw rate, the steering wheel rate, and the throttle position is greater than, or less than the respective thresholds. An operating mode of the vehicle is changed from a nominal control mode to a performance control mode when the yaw rate is greater than a first threshold yaw rate and less than the second threshold yaw rate, steering wheel rate of rotation is greater than the threshold steering wheel rate of rotation, and the throttle position is greater than the threshold throttle position.

Abstract: This invention describes a control method for a hydraulic coupling system that includes pressurizing a fluid in an actuator coupled to a multi-disk clutch pack to engage the clutch pack, pumping the fluid through the clutch pack to cool the clutch pack, and controlling one or more valve actuators and one or more pump-motors with a controller. The control method may incorporate pulse width modulation of the actuators, such as the actuators for the pump-motor and valve.

Abstract: A torque-biasing system (10) including a torque-biasing device (12) and a control unit (14) for use in a vehicle (16). The torque-biasing system is preferably installed and used in a vehicle having a first wheel (18) with a first rotational speed and a second wheel (20) with a second rotational speed, and an engine (22) with a torque output. The control unit (14) calculates an error value based on a different between the first rotational speed and second rotational speed and derives a control signal based upon proportional and integral terms of the error value with a forgetting factor. The control unit then sensor the control signal to the torque-biasing device (12).

Abstract: A device for coupling an input shaft and an output shaft is provided. The device preferably includes a carrier coupled to the input shaft, a hydraulic pump coupled to the carrier and the output shaft, a hydraulic conduit coupled to the hydraulic pump, a piston coupled to the hydraulic conduit, a clutch coupled to the piston, and a control valve coupled to the hydraulic conduit.

Abstract: A vehicle drive control system comprising a primary driving system having a first power source for providing torque to a first set of one or more wheels and an auxiliary driving system having a second power source for providing torque to a second set of one or more wheels of the vehicle. The auxiliary driving control system is configured to apply torque to a second set of one or more wheels of the vehicle to arrest downhill movement of the vehicle.

Abstract: A device for coupling an input shaft and an output shaft of an automobile is provided. The device preferably includes a rolling element, a holding element adapted to contain annular movement of the rolling element and allow axial movement of the rolling element, an annular cam adapted to cause axial movement of the rolling element upon relative rotational movement of the annular cam and the holding element, a pressure chamber, and a piston adapted to increase pressure in the pressure chamber upon axial movement of the rolling element and to resist axial movement of the rolling element upon the presence of sufficient pressure in the pressure chamber.

Abstract: A device for coupling an input shaft and an output shaft is provided. The device includes a carrier coupled to the input shaft, a pressure chamber, and a rotary pump coupled to the carrier in the output shaft. The rotary pump is adapted to increase pressure in the pressure chamber upon relative rotational movement of the carrier and the output shaft and to resist relative rotational movement of the carrier in the output shaft upon the presence of sufficient pressure in the pressure chamber.