Patents by Inventor Hymam Lam

Hymam Lam has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Substrate support having brazed plates and resistance heater
    Patent number: 7705275
    Abstract: A substrate support comprises top, middle and bottom plates which are brazed together. The top plate has a top surface with a plurality of outwardly projecting mesas dispersed across a recessed pocket, a network of recessed grooves, a vacuum port terminating in the recessed grooves, and plurality of gas ports. The middle plate has a plurality of middle feedthroughs aligned to corresponding top feedthroughs of the top plate, and the bottom plate has a plurality of bottom feedthroughs aligned to the middle feedthroughs of the middle plate. The top and middle plates are joined by a first brazed bond layer and the middle and bottom plates are joined by a second brazed bond layer.
    Type: Grant
    Filed: August 17, 2006
    Date of Patent: April 27, 2010
    Assignee: Applied Materials, Inc.
    Inventors: Salvador P. Umotoy, Lawrence Chung-Lai Lei, Gwo-chun Tzu, Xiangxiong (John) Yuan, Michael S. Jackson, Hymam Lam
  • Substrate support having brazed plates and resistance heater
    Publication number: 20070040265
    Abstract: A substrate support comprises top, middle and bottom plates which are brazed together. The top plate has a top surface with a plurality of outwardly projecting mesas dispersed across a recessed pocket, a network of recessed grooves, a vacuum port terminating in the recessed grooves, and plurality of gas ports. The middle plate has a plurality of middle feedthroughs aligned to corresponding top feedthroughs of the top plate, and the bottom plate has a plurality of bottom feedthroughs aligned to the middle feedthroughs of the middle plate. The top and middle plates are joined by a first brazed bond layer and the middle and bottom plates are joined by a second brazed bond layer.
    Type: Application
    Filed: August 17, 2006
    Publication date: February 22, 2007
    Applicant: Applied Materials, Inc.
    Inventors: Salvador Umotoy, Lawrence Lei, Gwo-Chuan Tzu, Xiaoxiong Yuan, Michael Jackson, Hymam Lam