Patents by Inventor Hyo Hyeong KANG

Hyo Hyeong KANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for measuring semiconductor device
    Patent number: 10551326
    Abstract: A method for measuring a semiconductor device is provided. A method for measuring a semiconductor device includes defining an interest area and an acceptable area in a chip area on a wafer; performing a first measurement of the chip area with a spectral imaging device to acquire spectrum data of the chip area; assuming the distribution of the spectrum data of a first pixel in the acceptable area is a normal distribution; calculating a distance from a central point on the normal distribution to second pixels in the interest area; selecting a position of a second pixel having a distance from the central point on the normal distribution greater than a predetermined range, among the second pixels, as a candidate position; and performing a second measurement of the candidate position.
    Type: Grant
    Filed: December 27, 2017
    Date of Patent: February 4, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Hyo Hyeong Kang, Kang Woong Ko, Sung Yoon Ryu, Gil Woo Song, Jae Hyung Ahn, Chul Hyung Yoo, Kyoung Hwan Lee, Sung Ho Jang, Yong Ju Jeon, Hyoung Jo Jeon
  • METHOD FOR MEASURING SEMICONDUCTOR DEVICE
    Publication number: 20180202942
    Abstract: A method for measuring a semiconductor device is provided. A method for measuring a semiconductor device includes defining an interest area and an acceptable area in a chip area on a wafer; performing a first measurement of the chip area with a spectral imaging device to acquire spectrum data of the chip area; assuming the distribution of the spectrum data of a first pixel in the acceptable area is a normal distribution; calculating a distance from a central point on the normal distribution to second pixels in the interest area; selecting a position of a second pixel having a distance from the central point on the normal distribution greater than a predetermined range, among the second pixels, as a candidate position; and performing a second measurement of the candidate position.
    Type: Application
    Filed: December 27, 2017
    Publication date: July 19, 2018
    Inventors: Hyo Hyeong KANG, Kang Woong KO, Sung Yoon RYU, Gil Woo SONG, Jae Hyung AHN, Chul Hyung YOO, Kyoung Hwan LEE, Sung Ho JANG, Yong Ju JEON, Hyoung Jo JEON