Abstract: Embodiments of the inventive concept provide a substrate processing apparatus. The substrate treating apparatus comprises a process treating unit providing a treating space performed treating the substrate; a plasma generating unit generating the plasma discharging a process gas, and supplying the plasma to the treating space. The plasma generating unit provides a plasma chamber having a generating space of the plasma; an antenna wound to surround the plasma chamber outside the plasma chamber; a first coating film covering inside walls of the plasma chamber and comprising yttrium fluoride (YF3).

Abstract: Provided are a method of preparing a hydrolysate of soy protein concentrate, a hydrolysate of soy protein concentrate prepared by the above method, and a feed composition including the hydrolysate.

Abstract: Embodiments of the inventive concept provide a substrate processing apparatus. The substrate treating apparatus comprises a process treating unit providing a treating space performed treating the substrate; a plasma generating unit generating the plasma discharging a process gas, and supplying the plasma to the treating space. The plasma generating unit provides a plasma chamber having a generating space of the plasma; an antenna wound to surround the plasma chamber outside the plasma chamber; a first coating film covering inside walls of the plasma chamber and comprising yttrium fluoride (YF3).

Abstract: Provided are a method of concentrating protein in grain powder, grain powder including protein that has been concentrated by using the method, and a feed additive including the grain powder including concentrated protein. According to the method of concentrating protein in grain powder, grain powder is treated with enzyme to increase the water-soluble saccharide content in a source, and by inoculating bacteria or yeast and fermentation, the increased water-soluble saccharide is removed, leading to a higher concentration of protein. Thus, the protein content ratio increase effects and the function of grain powder as a protein source are enhanced.

Abstract: Provided are a method of concentrating protein in grain powder, grain powder including protein that has been concentrated by using the method, and a feed additive including the grain powder including concentrated protein. According to the method of concentrating protein in grain powder, grain powder is treated with enzyme to increase the water-soluble saccharide content in a source, and by inoculating bacteria or yeast and fermentation, the increased water-soluble saccharide is removed, leading to a higher concentration of protein. Thus, the protein content ratio increase effects and the function of grain powder as a protein source are enhanced.