Patents by Inventor HYO-JONG HWANG

HYO-JONG HWANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • APPARATUS AND METHOD FOR TREATING SUBSTRATE
    Publication number: 20240170304
    Abstract: The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes treating modules having an opening for taking in and taking out a substrate and which are stacked on each other; and an air flow generating member for generating a downward airflow at each treating module, and wherein the air flow generating member includes: a pan unit configured to supply an air; a spray unit configured to be provided above the treating module and which sprays an air supplied from the pan unit; and an exhaust unit configured to exhaust an air sprayed by the spray unit to outside of the treating module.
    Type: Application
    Filed: November 21, 2023
    Publication date: May 23, 2024
    Applicant: SEMES CO., LTD.
    Inventors: Ho Jong HWANG, Hyun Goo PARK, Hyo Won YANG, Ki-Moon KANG, Sang Min LEE, Se Hoon OH, Won Sik SON
  • SUPPLY CONTROL SYSTEM FOR A PLURALITY OF TANKS
    Publication number: 20230408034
    Abstract: A supply control system for a tank utilized in a semiconductor manufacturing process is disclosed.
    Type: Application
    Filed: September 16, 2021
    Publication date: December 21, 2023
    Inventors: WILLIAM THOMAS PILTZ, CYNTHIA LEE HUGHES, JOHN PAUL PREGO, SHAWN S. CABLE, SANG-JAE YIM, ANTHONY JOHN SMITH, JIHOON KIM, SANG-KEUN LEE, YONG-TAE KIM, TAE-UG KANG, HO-SAN KWON, SUNG-UP JANG, YOUNG-SOO CHOI, HYO-JONG HWANG, BANG-YEON YU