Abstract: A rail environment monitoring device using a traveling vehicle, the rail environment monitoring device includes a sensing unit connected to a traveling vehicle transporting a conveyed object along a travel rail, the sensing unit configured to sense a travel rail positioned on a path of travel of the traveling vehicle and a travel rail peripheral portion, and a map production unit configured to generate a map for the travel rail or the travel rail peripheral portion using data acquired by the sensing unit according to the path of travel of the traveling vehicle.

Abstract: Disclosed is an article transferring apparatus, including: a vehicle traveling along a travel rail installed on a ceiling; a hoist module connected to the vehicle and transferring an article; a step difference measurement unit which is installed in the vehicle, and measures a step difference of the travel rail by measuring distances values to a traveling surface of the travel rail by a first displacement sensor and a second displacement sensor arranged at a predetermined interval along a travel direction; and a controller for determining whether there is a step difference of the travel rail by correcting an error between a first measurement value of the first displacement sensor and a second measurement value of the second displacement sensor according to an inclination of the vehicle.

Abstract: A cleaning device for a substrate transfer device comprises a traveling unit configured to travel along a rail having first and second areas, a rail unit including the rail and a rail structure disposed on the rail, and a rinsing unit including a suction part disposed on the rail and that rotates about a suction nozzle. When the rinsing unit is placed in contact with the rail structure, the suction part rotates about the suction nozzle.