Patents by Inventor Hyok Keo Se KWON

Hyok Keo Se KWON has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Electrostatic chuck and electrostatic adsorption apparatus having the same
    Patent number: 11309205
    Abstract: An electrostatic chuck and an electrostatic adsorption apparatus including the same are disclosed. The electrostatic chuck includes a base, a cushion layer on the base, an electrode layer on the cushion layer, and a dielectric layer on the electrode layer, the base, the cushion layer, the electrode layer, and the dielectric layer have through holes. The through holes each have a rectangular shape, and each corner region of the dielectric layer has a pair of the through holes, and the central axes of the pair of the through holes respectively intersect two adjacent sides of the dielectric layer at the respective corner region.
    Type: Grant
    Filed: October 2, 2019
    Date of Patent: April 19, 2022
    Assignee: Samsung Display Co., Ltd.
    Inventors: Min Ho Bae, Hyok Keo Se Kwon, Tae Ho Youn
  • ELECTROSTATIC CHUCK AND ELECTROSTATIC ADSORPTION APPARATUS HAVING THE SAME
    Publication number: 20200126835
    Abstract: An electrostatic chuck and an electrostatic adsorption apparatus including the same are disclosed. The electrostatic chuck includes a base, a cushion layer on the base, an electrode layer on the cushion layer, and a dielectric layer on the electrode layer, the base, the cushion layer, the electrode layer, and the dielectric layer have through holes. The through holes each have a rectangular shape, and each corner region of the dielectric layer has a pair of the through holes, and the central axes of the pair of the through holes respectively intersect two adjacent sides of the dielectric layer at the respective corner region.
    Type: Application
    Filed: October 2, 2019
    Publication date: April 23, 2020
    Inventors: Min Ho BAE, Hyok Keo Se KWON, Tae Ho YOUN