Abstract: Embodiments relate to a deposition device that operates in two modes: a deposition mode, and a cleaning mode. In the deposition mode, modular injectors inject materials onto a substrate to form a layer. In the cleaning mode, the deposition device is cleaned without disassembly by injecting a cleaning gas. The injector module assembly may be cleaned in the cleaning mode by injecting cleaning gas through an exhaust for removing reactant precursor and routing the cleaning gas from the exhaust to another exhaust for removing source precursor. Alternatively, the injector module assembly is cleaned by injecting cleaning gas into a passage between an injector for injecting a source precursor and another injector for injecting a reactant precursor, and routing the cleaning gas to one of the exhausts in the cleaning mode.

Abstract: One embodiment relates to an oblique illuminator. The oblique illuminator includes a light source emitting a light beam, a first reflective surface, and a second reflective surface. The first reflective surface has a convex cylindrical shape with a projected parabolic profile along the non-powered direction which is configured to reflect the light beam from the light source and which defines a focal line. The second reflective surface has a concave cylindrical shape with a projected elliptical profile which is configured to reflect the light beam from the first reflective surface and which defines first and second focal lines. The focal line of the first reflective surface is coincident with the first focal line of the second reflective surface. The first and second focal lines of the second reflective surface may be a same line in which case the elliptical curvature is a projected spherical profile. Other embodiments, aspects and features are also disclosed.

Abstract: Embodiments relate to an injection module assembly (IMA) including a body and injectors installed in a module block. The body is formed with a plurality of openings defined by walls extending from the bottom surface to the top surface. Each of the walls includes bulging ridges at the bottom along bottom portions of the injectors. The bulging ridges prevent gas or radicals injected by adjacent injectors from mixing at locations other than on the top surface of a substrate placed below the IMA. Accordingly, the injectors can be placed with closer proximity to each other despite the compact size of the IMA.

Abstract: Embodiments relate to an injection module assembly (IMA) including a body and replaceable injectors installed in a module block. Each of the injectors includes a protruding leg that is received in a support hole formed in the module block. The protruding leg provides support for the injector while an end block at an opposite end of the injector is secured to the module block. The end block and the protruding leg enable convenient mounting or removal of the module.

Abstract: Embodiments relate to a deposition device that operates in two modes: a deposition mode, and a cleaning mode. In the deposition mode, modular injectors inject materials onto a substrate to form a layer. In the cleaning mode, the deposition device is cleaned without disassembly by injecting a cleaning gas. The injector module assembly may be cleaned in the cleaning mode by injecting cleaning gas through an exhaust for removing reactant precursor and routing the cleaning gas from the exhaust to another exhaust for removing source precursor. Alternatively, the injector module assembly is cleaned by injecting cleaning gas into a passage between an injector for injecting a source precursor and another injector for injecting a reactant precursor, and routing the cleaning gas to one of the exhausts in the cleaning mode.

Abstract: Embodiments relate to a deposition device for depositing one or more layers of material on a substrate using scanning modules that move across the substrate in a chamber filled with reactant precursor. The substrate remains stationary during the process of depositing the one or more layers of material. A chamber enclosing the substrate is filled with reactant precursor to expose the substrate to the reactant precursor. As the scanning modules move across the substrate, the scanning modules remove the reactant precursor in their path and/or revert the reactant precursor to an inactive state. The scanning modules also inject source precursor onto the substrate as the scanning modules move across the substrate.

Abstract: One embodiment relates to an oblique illuminator. The oblique illuminator includes a light source emitting a light beam, a first reflective surface, and a second reflective surface. The first reflective surface has a convex cylindrical shape with a projected parabolic profile along the non-powered direction which is configured to reflect the light beam from the light source and which defines a focal line. The second reflective surface has a concave cylindrical shape with a projected elliptical profile which is configured to reflect the light beam from the first reflective surface and which defines first and second focal lines. The focal line of the first reflective surface is coincident with the first focal line of the second reflective surface. The first and second focal lines of the second reflective surface may be a same line in which case the elliptical curvature is a projected spherical profile. Other embodiments, aspects and features are also disclosed.

Abstract: One embodiment relates to an oblique illuminator. The oblique illuminator includes a light source emitting a light beam, a first reflective surface, and a second reflective surface. The first reflective surface has a convex cylindrical shape with a projected parabolic profile along the non-powered direction which is configured to reflect the light beam from the light source and which defines a focal line. The second reflective surface has a concave cylindrical shape with a projected elliptical profile which is configured to reflect the light beam from the first reflective surface and which defines first and second focal lines. The focal line of the first reflective surface is coincident with the first focal line of the second reflective surface. The first and second focal lines of the second reflective surface may be a same line in which case the elliptical curvature is a projected spherical profile. Other embodiments, aspects and features are also disclosed.

Abstract: One embodiment relates to an oblique illuminator. The oblique illuminator includes a light source emitting a light beam, a first reflective surface, and a second reflective surface. The first reflective surface has a convex cylindrical shape with a projected parabolic profile along the non-powered direction which is configured to reflect the light beam from the light source and which defines a focal line. The second reflective surface has a concave cylindrical shape with a projected elliptical profile which is configured to reflect the light beam from the first reflective surface and which defines first and second focal lines. The focal line of the first reflective surface is coincident with the first focal line of the second reflective surface. The first and second focal lines of the second reflective surface may be a same line in which case the elliptical curvature is a projected spherical profile. Other embodiments, aspects and features are also disclosed.

Abstract: A probe card includes a printed circuit board (PCB) and a probe ring coupled to the PCB. The probe card further includes a plurality of probes coupled to the PCB and to the probe card, and includes a plurality of tubes respectively associated with the plurality of probes. Each tube is configured to surround at least a portion of the probe that the tube is associated with. Each tube includes an inner dielectric portion and an outer conductive portion. The conductive portion of each tube is electrically coupled to the PCB.

Abstract: A probe card includes a first probe plate having a first plurality of tapered apertures formed therein. Each of the tapered apertures has a first opening that is smaller than a second opening. The first openings and the second openings are on opposite surfaces of the first probe plate. The probe card further includes a second probe plate having a second plurality of tapered apertures formed therein. Each of the tapered apertures has a first opening that is smaller than a second opening. The first openings and the second openings are on opposite surfaces of the second probe plate. The surfaces having the second openings are disposed adjacent to one another. Pairs of the tapered apertures of the first and second probe plates substantially align. The probe card further includes a plurality of probes, wherein each of the probes is disposed in one of the pairs of the tapered apertures.

Abstract: An assembly for coupling light between a fiber optic cable connector and optoelectronic devices in an optoelectronic transceiver and method of fabricating the same. An Electric Discharge Machining process shapes and precisely dimensions several slots and alignment holes in a bulkhead. Several very small spherical refractive lenses are picked up and placed into each slot by a vacuum tool. Since the intake cavity at the working end of the vacuum tool has the same width and length as does each of the slots, the spherical lenses are placed in the slots precisely as picked up in the intake cavity. The spherical lenses are then secured in the slots by a coining process, which involves a force applied to a soft metal portion of the bulkhead. Under the action of the applied force, the soft metal around the spherical lenses deforms, thus embedding the spherical lenses in the slots.