Abstract: A microelectromechanical transducer and test system is disclosed. One embodiment includes a body, a probe moveable relative to the body, and a micromachined comb drive. The micromachined comb drive includes a plurality of sensing capacitors forming a differential capacitive displacement sensor, each sensing capacitor comprising a plurality of comb capacitors and each configured to provide capacitance levels which, together, are representative of a position of the probe.

Abstract: A system and method of measuring an interaction force is disclosed. One embodiment includes providing a method of measuring an interaction force including providing a microelectromechanical transducer. The transducer includes a body, a probe moveable relative to the body, and a micromachined comb drive. The micromachined comb drive includes a differential capacitive displacement sensor to provide a sensor output signal representative of an interaction force on the probe. The probe is moved relative to a sample surface. An interaction force is determined between the probe and the sample surface using the sensor output, as the probe is moved relative to the sample surface.