Abstract: The trench structure part includes a field plate electrode, a first insulating film, a second insulating film, the second insulating film extending to be more proximate to the first surface than the first insulating film, a gate electrode including a first portion located on the second insulating film, and a second portion located on the first insulating film, the second portion being thicker than the first portion, and a third insulating film. The gate contact part extends from the gate wiring layer toward the second portion and contacts the second portion. The gate contact part is not positioned between the first portion and the gate wiring layer. The first portion is positioned adjacent, in a second direction orthogonal to the first direction, to a lower end portion of the gate contact part contacting the second portion.