Patents by Inventor Hyun-Gi Cho

Hyun-Gi Cho has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 6960265
    Abstract: An apparatus and method for automatically collecting metallic impurities of a semiconductor wafer. In one aspect, an apparatus includes an air tight process chamber including a loading unit for loading the semiconductor wafer and unloading unit for unloading the semiconductor wafer; a vapor phase decomposition unit disposed in the process chamber for decomposing a silicon oxide layer on the semiconductor wafer; and a scanning unit disposed in the process chamber for scanning the semiconductor wafer to collect the metallic impurities. The scanning unit includes a scanning solution bottle for obtaining scanning solution that is used for absorbing metallic impurities on the semiconductor wafer; a scanning arm capable of downward, upward, and rotational movement; and a nozzle coupled to the scanning arm for drawing in scanning solution from the scanning solution bottle, and for forming a droplet of scanning solution that cohers to the nozzle when scanning a semiconductor wafer to collect metallic impurities.
    Type: Grant
    Filed: March 21, 2002
    Date of Patent: November 1, 2005
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Yong-Woo Heo, June-Ing Gill, Mi-Kyoung Lee, Hyun-Gi Cho
  • Publication number: 20020134406
    Abstract: An apparatus and method for automaticaly collecting metallic impurities of a semiconductor wafer. In one aspect, an apparatus comprises: an air tight process chamber comprising a loading unit for loading the semiconductor wafer and unloading unit for unloading the semiconductor wafer; a vapor phase decomposition unit disposed in the process chamber for decomposing a silicon oxide layer on the semiconductor wafer; and a scanning unit disposed in the process chamber for scanning the semiconductor wafer to collect the metallic impurities. The scanning unit comprises a scanning solution bottle for obtaining scanning solution that is used for absorbing metallic impurities on the semiconductor wafer; a scanning arm capable of downward, upward, and rotational movement; and a nozzle coupled to the scanning arm for drawing in scanning solution from the scanning solution bottle, and for forming a droplet of scanning solution that cohers to the nozzle when scanning a semiconductor wafer to collect metallic impurities.
    Type: Application
    Filed: March 21, 2002
    Publication date: September 26, 2002
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Yong-Woo Heo, June-Ing Gill, Mi-Kyoung Lee, Hyun-Gi Cho
  • Patent number: 5570198
    Abstract: A paid broadcast receiving device has a decoder connection detector for determining whether or not a video cassette recorder (VCR) and a canal+ decoder are connected. The determination depends on an impedance match between the VCR and decoder when a canal+ broadcast channel is selected after the canal+ channel is stored in a system where a VCR is to be connected to a canal+ decoder and a television. The system thereby receives and/or records canal+ broadcasts without a decoder, for paid broadcasts sent via a public line, even if the canal+ decoder is not connected to the VCR. Users are able to easily judge whether or not the canal+ decoder is connected.
    Type: Grant
    Filed: July 27, 1994
    Date of Patent: October 29, 1996
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Hyun-gi Cho