Patents by Inventor Hyun Hoo KIM

Hyun Hoo KIM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for processing substrate and method of determining whether substrate treatment process is normal
    Patent number: 12112960
    Abstract: The inventive concept provides a method to determine whether a substrate treatment process is normal using a deep learning model. The method comprising receiving input on a substrate treatment process video, preprocessing the inputted video, using the deep learning model to study a preprocessed video, and determining whether the substrate treatment process is normal by comparing the trained model and a real time substrate treatment process video.
    Type: Grant
    Filed: September 14, 2021
    Date of Patent: October 8, 2024
    Assignee: SEMES CO., LTD.
    Inventors: Ohyeol Kwon, Soo Yeon Shin, Hyun Hoo Kim, Myung Chan Cho
  • APPARATUS FOR PROCESSING SUBSTRATE AND METHOD OF DETERMINING WHETHER SUBSTRATE TREATMENT PROCESS IS NORMAL
    Publication number: 20220093430
    Abstract: The inventive concept provides a method to determine whether a substrate treatment process is normal using a deep learning model. The method comprising receiving input on a substrate treatment process video, preprocessing the inputted video, using the deep learning model to study a preprocessed video, and determining whether the substrate treatment process is normal by comparing the trained model and a real time substrate treatment process video.
    Type: Application
    Filed: September 14, 2021
    Publication date: March 24, 2022
    Applicant: SEMES CO., LTD.
    Inventors: Ohyeol KWON, Soo Yeon SHIN, Hyun Hoo KIM, Myung Chan CHO