Abstract: A passive cooling system for a nuclear reactor includes an energy release space in which a reactor vessel is accommodated, an energy absorbing space separated from the energy release space, and an energy transfer space above the energy absorbing space and configured to absorb and cool heat transferred from the reactor vessel and discharge the absorbed heat to an outside of the system through an outer wall thereof. The passive cooling system further includes a first cooling flow path configured to transfer the heat in the reactor vessel to the energy transfer space, a pressure balance pipe configured to transfer the pressure in the energy release space to the energy absorbing space therethrough, and a coolant spray pipe configured to transfer the cooling water in the energy absorbing space pressurized by the pressure balance pipe to the energy transfer space may be provided.

Abstract: The wafer carrier information management system includes a reader unit for reading wafer carrier information from a transmitting/receiving unit attached to a wafer carrier in a buffer, and a reader unit controller for collecting the wafer carrier information from the reader unit. The system may further include a buffer controller for collecting the wafer carrier information from the reader unit controller, and a wafer manager for receiving the wafer carrier information from the buffer controller.

Abstract: A loader for a substrate storage container defines a buffer space in which the substrate storage container is temporarily stored between a transfer facility and a semiconductor production facility of a semiconductor production line. The loader includes a load port configured to store the substrate storage container, a buffer port configured to store the substrate storage container, a transfer robot to transfer the substrate storage container within the loader, and a dual entrance sensing device on the transfer robot to determine if the substrate storage container is loaded on the load port and to determine if the substrate storage container is loaded on the buffer port.

Abstract: The wafer carrier information management system includes a reader unit for reading wafer carrier information from a transmitting/receiving unit attached to a wafer carrier in a buffer, and a reader unit controller for collecting the wafer carrier information from the reader unit. The system may further include a buffer controller for collecting the wafer carrier information from the reader unit controller, and a wafer manager for receiving the wafer carrier information from the buffer controller.