Patents by Inventor Hyun Jeong Yoo

Hyun Jeong Yoo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • RETAINER RING FOR CARRIER HEAD FOR CHEMICAL POLISHING APPARATUS AND CARRIER HEAD COMPRISING SAME
    Publication number: 20180264621
    Abstract: Provided is a retainer ring of a carrier head for a chemical polishing apparatus, including a first retainer ring member that touches an outer side surface of a wafer, a second retainer ring member that is provided on an outer side and top of the first retainer ring member and does not touch the outer side surface of the wafer, and a pressure reducing means for reducing the pressure transmitted from the second retainer ring member down to the first retainer ring member.
    Type: Application
    Filed: November 17, 2015
    Publication date: September 20, 2018
    Inventor: Hyun Jeong Yoo