Abstract: This application relates to a pellicle for extreme ultraviolet lithography and a manufacturing method thereof using the low-temperature direct growth method of multilayer graphene. In one aspect, the method includes forming an etch stopper on a substrate, forming a seed layer on the etch stopper, the seed layer including at least one of amorphous boron, BN, BCN, B4C, or Me-X (Me is at least one of Si, Ti, Mo, or Zr, and X is at least one of B, C, or N). The method may also include forming a metal catalyst layer on the seed layer; forming an amorphous carbon layer on the metal catalyst layer, and directly growing multilayer graphene on the seed layer through interlayer exchange between the metal catalyst layer and the amorphous carbon layer by performing a low-temperature heat treatment at 450° C. to 600° C.

Abstract: A display device may include a first sub-pixel including a first light emitting element disposed in a first sub-pixel area of a substrate, a second sub-pixel including a second light emitting element disposed in a second sub-pixel area located in a first direction with respect to the first sub-pixel area of the substrate, a bank layer disposed between the first and second sub-pixels, a first color filter pattern disposed on the first sub-pixel and the bank layer, and a second color filter pattern disposed on the second sub-pixel and the bank layer. The first light emitting element may emit light having a first color. The second light emitting element may emit light having a second color. The first color filter pattern and the second color filter pattern may at least partially overlap each other on the bank layer.

Abstract: This application relates to a pellicle for extreme ultraviolet lithography based on yttrium (Y) and used in a lithography process using extreme ultraviolet rays. In one aspect, the pellicle includes a pellicle layer including a core layer formed of an yttrium-based material expressed as Y-M (M is one of B, Si, O, or F).

Abstract: A pipeline system includes a first inverter latch configured to receive plural data entries, and plural second inverter latches coupled to each other in parallel for storing the plural data entries input from the first inverter latch in a distributive manner. Plural first switches are arranged between the first inverter latch and the plural second inverter latches, each first switch configured for controlling transmission of each of the plural data entries from the first inverter latch to one of the plural second inverter latches. Plural second switches are configured to output the plural data entries stored in the plural second inverter latches.

Abstract: A substrate processing apparatus is provided and includes: a support unit including a spin chuck and a centering jig that is on the spin chuck, the spin chuck configured to support and rotate a substrate; a spraying unit configured to spray processing liquid onto the substrate; a swing arm including a correction unit that includes a sensor and an emitter, the swing arm configured to move such that the correction unit moves to a target point on the substrate, and the emitter configured to irradiate a beam towards the substrate; and a controller configured to: control the spin chuck and the swing arm; and determine whether a movement trajectory of the swing arm is aligned with a rotation center of the spin chuck based on information acquired by the sensor about the centering jig.

Abstract: Provided is a control device and a substrate processing apparatus including the same. The substrate processing apparatus includes a support unit configured to support and rotate a first substrate, the support unit including a spin chuck, a spray unit configured to spray a processing fluid on the first substrate, a correction unit on a swing arm and configured to irradiate a beam onto the first substrate when the processing fluid is provided on the first substrate, wherein the swing arm is adjacent to the spin chuck and is configured to move the correction unit to a target point on the first substrate, and a controller configured to control the spin chuck and the swing arm, and correct a position error of the swing arm using a second substrate, wherein a plurality of anchor patterns are on the second substrate.

Abstract: A control device and a substrate processing apparatus including the same are provided. The substrate processing apparatus includes: a support unit including a spin head and configured to support and to rotate a substrate; a spraying unit configured to spray processing liquid onto the substrate; a correction unit in a swing arm, the correction unit configured to move to a target point on the substrate and to irradiate a beam when the processing liquid is sprayed onto the substrate; and a control unit configured to calculate the target point, wherein the control unit is configured to convert image coordinates associated with a first coordinate system and then to calculate the target point by converting the image coordinates associated with the first coordinate system into image coordinates associated with a second coordinate system, and the second coordinate system is based on rotation angles of the spin head and the swing arm.

Abstract: A mobile communication device storing a file to be printed, the mobile communication device including: a communication unit to receive printer information of a printer; a network interface unit to connect to a printer server corresponding to the printer information received through the communication unit; and a control unit to transmit the file to be printed to the printer through the printer server according to the received printer information. Accordingly, users can print files using a mobile communication device while traveling away from a fixed printer.

Abstract: A mobile communication device storing a file to be printed, the mobile communication device including: a communication unit to receive printer information of a printer; a network interface unit to connect to a printer server corresponding to the printer information received through the communication unit; and a control unit to transmit the file to be printed to the printer through the printer server according to the received printer information. Accordingly, users can print files using a mobile communication device while traveling away from a fixed printer.

Abstract: Disclosed is a composition for preparing a rigid polyurethane foam having a good demolding property by defining polyol component and catalyst component. The polyol component comprises 40˜60 wt. % of polyol obtained by polymerization with an organic oxide using sorbitol as an initiator, 5˜10 wt. % of polyol obtained by polymerization with an organic oxide using ethylene diamine as an initiator, 20˜30 wt. % of polyol obtained by polymerization with an organic oxide using toluene diamine or toluene diamine and triethanol amine as a single or a complex initiator, and, optionally, 5˜20 wt. % of multivalent polyol of an ester structure, and the catalyst component is chosen in a group comprising a foaming catalyst, a gelling catalyst, a trimerization catalyst, a mixed form of the foaming catalyst and the gelling catalyst, and compound thereof.

Abstract: Disclosed is a composition for preparing a rigid polyurethane foam having a good demolding property by defining polyol component and catalyst component. The polyol component comprises 40-60 wt. % of polyol obtained by polymerization with an organic oxide using sorbitol as an initiator, 5˜10 wt. % of polyol obtained by polymerization with an organic oxide using ethylene diamine as an initiator, 20˜30 wt. % of polyol obtained by polymerization with an organic oxide using toluene diamine or toluene diamine and triethanol amine as a single or a complex initiator, and, optionally, 5-20 wt. % of multivalent polyol of an ester structure, and the catalyst component is chosen in a group comprising a foaming catalyst, a gelling catalyst, a trimerization catalyst, a mixed form of the foaming catalyst and the gelling catalyst, and compound thereof.