Patents by Inventor Hyun-Kwan Yu
Hyun-Kwan Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 11942528Abstract: A semiconductor device comprising a plurality of active patterns on a substrate. The semiconductor device may include a device isolation layer defining the plurality of active patterns, a gate electrode extending across the plurality of active patterns, and a source/drain pattern on the active patterns. The plurality of active patterns may comprise a first active pattern and a second active pattern. The source/drain pattern comprises a first part on the first active pattern, a second part on the second active pattern, and a third part extending from the first part and along an upper portion of the first active pattern. The device isolation layer comprises a first outer segment on a sidewall of the first active pattern below the source/drain pattern. A lowermost level of a bottom surface of the third part may be lower than an uppermost level of a top surface of the first outer segment.Type: GrantFiled: May 12, 2023Date of Patent: March 26, 2024Inventors: Hyun-Kwan Yu, Min-Hee Choi
-
Patent number: 11935943Abstract: A method of manufacturing a semiconductor device, the method including: forming, in a first region of a substrate, an active fin and a sacrificial gate structure intersecting the active fin; forming a first spacer and a second spacer on the substrate to cover the sacrificial gate structure; forming a mask in a second region of the substrate to expose the first region of the substrate; removing the second spacer from the first spacer in the first region of the substrate by using the mask; forming recesses at opposite sides of the sacrificial gate structure by removing portions of the active fin; forming a source and a drain in the recesses; and forming an etch-stop layer to cover both sidewalls of the sacrificial gate structure and a top surfaces of the source and drain.Type: GrantFiled: January 10, 2022Date of Patent: March 19, 2024Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Hyun Kwan Yu, Seung Hun Lee, Yang Xu
-
Publication number: 20240055428Abstract: A semiconductor device comprises a substrate including NMOSFET and PMOSFET regions, first and second channel patterns on the NMOSFET and PMOSFET regions, respectively, and each including respective semiconductor patterns spaced apart from and vertically stacked on each other, first and second source/drain patterns on the NMOSFET and NMOSFET regions and connected to the first and second channel patterns, respectively, and a gate electrode on the first and second channel patterns. The gate electrode includes a first inner electrode between neighboring semiconductor patterns of the first channel pattern, and a second inner electrode between neighboring semiconductor patterns of the second channel pattern. A top surface of the first inner electrode is more convex than a top surface of the second inner electrode.Type: ApplicationFiled: March 13, 2023Publication date: February 15, 2024Applicant: Samsung Electronics Co., ltd.Inventors: Hyun-Kwan YU, Sunyoung LEE, Hayoung JEON, Hwiseok JUN, Ji Hoon CHA
-
Patent number: 11784255Abstract: A semiconductor device may include a first active fin, a second active fin and a gate structure. The first active fin may extend in a first direction on a substrate and may include a first straight line extension portion, a second straight line extension portion, and a bent portion between the first and second straight line extension portions. The second active fin may extend in the first direction on the substrate. The gate structure may extend in a second direction perpendicular to the first direction on the substrate. The gate structure may cross one of the first and second straight line extension portions of the first active fin and may cross the second active fin.Type: GrantFiled: December 11, 2020Date of Patent: October 10, 2023Inventors: Hyun-Kwan Yu, Sung-Min Kim, Dong-Suk Shin, Seung-Hun Lee, Dong-Won Kim
-
Publication number: 20230282719Abstract: A semiconductor device comprising a plurality of active patterns on a substrate. The semiconductor device may include a device isolation layer defining the plurality of active patterns, a gate electrode extending across the plurality of active patterns, and a source/drain pattern on the active patterns. The plurality of active patterns may comprise a first active pattern and a second active pattern. The source/drain pattern comprises a first part on the first active pattern, a second part on the second active pattern, and a third part extending from the first part and along an upper portion of the first active pattern. The device isolation layer comprises a first outer segment on a sidewall of the first active pattern below the source/drain pattern. A lowermost level of a bottom surface of the third part may be lower than an uppermost level of a top surface of the first outer segment.Type: ApplicationFiled: May 12, 2023Publication date: September 7, 2023Inventors: HYUN-KWAN YU, MIN-HEE CHOI
-
Publication number: 20230253449Abstract: A semiconductor device includes a lower pattern extending in a first direction and sheet patterns spaced apart therefrom in a second direction, a gate structure on the lower pattern and including a gate insulating layer, a gate spacer, and a gate electrode, a source/drain pattern on the lower pattern and in contact with the sheet patterns and the gate insulating layer, and a first etch blocking pattern between the gate spacer and the source/drain pattern. The gate spacer includes an inner sidewall extending in the third direction, and a connection sidewall extending from the inner sidewall in the first direction. The source/drain pattern includes a semiconductor filling layer on a semiconductor liner layer that is in contact with the sheet pattern and includes a facet surface extending from the connection sidewall. The first etch blocking pattern is in contact with the facet surface and the connection sidewall.Type: ApplicationFiled: September 26, 2022Publication date: August 10, 2023Inventors: Dong Suk Shin, Hyun-Kwan Yu, Seok Hoon Kim, Pan Kwi Park, Yong Seung Kim, Jung Taek Kim
-
Publication number: 20230231049Abstract: A semiconductor device includes a substrate including an active pattern, a channel pattern on the active pattern and including semiconductor patterns, a source/drain pattern connected to the semiconductor patterns, a gate electrode on the semiconductor patterns, and a gate dielectric layer between the gate electrode and the semiconductor patterns. An inner spacer of the gate dielectric layer includes a horizontal portion between the high-k dielectric layer and the second semiconductor pattern, a vertical portion between the high-k dielectric layer and the source/drain pattern, and a corner portion between the horizontal portion and the vertical portion. A first thickness of the horizontal portion is less than a second thickness of the vertical portion. The second thickness of the vertical portion is less than a third thickness of the corner portion.Type: ApplicationFiled: August 17, 2022Publication date: July 20, 2023Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Dongsuk SHIN, Hyun-Kwan Yu, Sunyoung Lee, Ji Hoon Cha, Kyungyeon Hwang
-
Patent number: 11688781Abstract: A semiconductor device comprising a plurality of active patterns on a substrate. The semiconductor device may include a device isolation layer defining the plurality of active patterns, a gate electrode extending across the plurality of active patterns, and a source/drain pattern on the active patterns. The plurality of active patterns may comprise a first active pattern and a second active pattern. The source/drain pattern comprises a first part on the first active pattern, a second part on the second active pattern, and a third part extending from the first part and along an upper portion of the first active pattern. The device isolation layer comprises a first outer segment on a sidewall of the first active pattern below the source/drain pattern. A lowermost level of a bottom surface of the third part may be lower than an uppermost level of a top surface of the first outer segment.Type: GrantFiled: December 23, 2020Date of Patent: June 27, 2023Inventors: Hyun-Kwan Yu, Min-Hee Choi
-
Patent number: 11569350Abstract: Disclosed is a semiconductor device including a first active pattern that extends in a first direction on an active region of a substrate, a first source/drain pattern in a recess on an upper portion of the first active pattern, a gate electrode that runs across a first channel pattern on the upper portion of the first active pattern and extends in a second direction intersecting the first direction, and an active contact electrically connected to the first source/drain pattern.Type: GrantFiled: July 9, 2021Date of Patent: January 31, 2023Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Sanggil Lee, Namkyu Cho, Seokhoon Kim, Kang Hun Moon, Hyun-Kwan Yu, Sihyung Lee
-
Publication number: 20220130982Abstract: A method of manufacturing a semiconductor device, the method including: forming, in a first region of a substrate, an active fin and a sacrificial gate structure intersecting the active fin; forming a first spacer and a second spacer on the substrate to cover the sacrificial gate structure; forming a mask in a second region of the substrate to expose the first region of the substrate; removing the second spacer from the first spacer in the first region of the substrate by using the mask; forming recesses at opposite sides of the sacrificial gate structure by removing portions of the active fin; forming a source and a drain in the recesses; and forming an etch-stop layer to cover both sidewalls of the sacrificial gate structure and a top surfaces of the source and drain.Type: ApplicationFiled: January 10, 2022Publication date: April 28, 2022Inventors: Hyun Kwan YU, Seung Hun LEE, Yang XU
-
Patent number: 11239344Abstract: A method of manufacturing a semiconductor device, the method including: forming, in a first region of a substrate, an active fin and a sacrificial gate structure intersecting the active fin; forming a first spacer and a second spacer on the substrate to cover the sacrificial gate structure; forming a mask in a second region of the substrate to expose the first region of the substrate; removing the second spacer from the first spacer in the first region of the substrate by using the mask; forming recesses at opposite sides of the sacrificial gate structure by removing portions of the active fin; forming a source and a drain in the recesses; and forming an etch-stop layer to cover both sidewalls of the sacrificial gate structure and a top surfaces of the source and drain.Type: GrantFiled: November 18, 2019Date of Patent: February 1, 2022Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Hyun Kwan Yu, Seung Hun Lee, Yang Xu
-
Publication number: 20210336007Abstract: Disclosed is a semiconductor device including a first active pattern that extends in a first direction on an active region of a substrate, a first source/drain pattern in a recess on an upper portion of the first active pattern, a gate electrode that runs across a first channel pattern on the upper portion of the first active pattern and extends in a second direction intersecting the first direction, and an active contact electrically connected to the first source/drain pattern.Type: ApplicationFiled: July 9, 2021Publication date: October 28, 2021Inventors: SANGGIL LEE, NAMKYU CHO, SEOKHOON KIM, KANG HUN MOON, HYUN-KWAN YU, SIHYUNG LEE
-
Patent number: 11069776Abstract: Disclosed is a semiconductor device including a first active pattern that extends in a first direction on an active region of a substrate, a first source/drain pattern in a recess on an upper portion of the first active pattern, a gate electrode that runs across a first channel pattern on the upper portion of the first active pattern and extends in a second direction intersecting the first direction, and an active contact electrically connected to the first source/drain pattern.Type: GrantFiled: February 13, 2020Date of Patent: July 20, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Sanggil Lee, Namkyu Cho, Seokhoon Kim, Kang Hun Moon, Hyun-Kwan Yu, Sihyung Lee
-
Patent number: 11010532Abstract: A simulation method includes storing a plurality of structure parameters of transistors for a semiconductor chip, imaging generating a first local layout which includes a first structure parameter extracted from a semiconductor device included in the first local layout, the first structure parameter being an actual parameter determined using the imaging equipment, generating second to n-th local layouts by modifying the first structure parameter included in the first local layout, wherein the second to n-th local layouts respectively have second to n-th structure parameters modified from the first structure parameter, calculating first to n-th effective density factors (EDF) respectively for the first to n-th structure parameters, determining a first effective open silicon density for a first chip using the first to n-th effective density factors and a layout of the first chip, and calculating first to m-th epitaxy times for first to m-th effective open silicon densities.Type: GrantFiled: February 18, 2020Date of Patent: May 18, 2021Assignee: SAMSUNG ELECTRONICS CO., LTD.Inventors: Alexander Schmidt, Dong-Gwan Shin, Anthony Payet, Hyoung Soo Ko, Seok Hoon Kim, Hyun-Kwan Yu, Si Hyung Lee, In Kook Jang
-
Publication number: 20210119036Abstract: A semiconductor device may include a first active fin, a second active fin and a gate structure. The first active fin may extend in a first direction on a substrate and may include a first straight line extension portion, a second straight line extension portion, and a bent portion between the first and second straight line extension portions. The second active fin may extend in the first direction on the substrate. The gate structure may extend in a second direction perpendicular to the first direction on the substrate. The gate structure may cross one of the first and second straight line extension portions of the first active fin and may cross the second active fin.Type: ApplicationFiled: December 11, 2020Publication date: April 22, 2021Inventors: Hyun-Kwan YU, Sung-Min KIM, Dong-Suk SHIN, Seung-Hun LEE, Dong-Won KIM
-
Publication number: 20210111259Abstract: A semiconductor device comprising a plurality of active patterns on a substrate. The semiconductor device may include a device isolation layer defining the plurality of active patterns, a gate electrode extending across the plurality of active patterns, and a source/drain pattern on the active patterns. The plurality of active patterns may comprise a first active pattern and a second active pattern. The source/drain pattern comprises a first part on the first active pattern, a second part on the second active pattern, and a third part extending from the first part and along an upper portion of the first active pattern. The device isolation layer comprises a first outer segment on a sidewall of the first active pattern below the source/drain pattern. A lowermost level of a bottom surface of the third part may be lower than an uppermost level of a top surface of the first outer segment.Type: ApplicationFiled: December 23, 2020Publication date: April 15, 2021Inventors: HYUN-KWAN YU, MIN-HEE CHOI
-
Publication number: 20210043730Abstract: Disclosed is a semiconductor device including a first active pattern that extends in a first direction on an active region of a substrate, a first source/drain pattern in a recess on an upper portion of the first active pattern, a gate electrode that runs across a first channel pattern on the upper portion of the first active pattern and extends in a second direction intersecting the first direction, and an active contact electrically connected to the first source/drain pattern.Type: ApplicationFiled: February 13, 2020Publication date: February 11, 2021Inventors: SANGGIL LEE, NAMKYU CHO, SEOKHOON KIM, KANG HUN MOON, HYUN-KWAN YU, SIHYUNG LEE
-
Patent number: 10896964Abstract: A semiconductor device comprising a plurality of active patterns on a substrate. The semiconductor device may include a device isolation layer defining the plurality of active patterns, a gate electrode extending across the plurality of active patterns, and a source/drain pattern on the active patterns. The plurality of active patterns may comprise a first active pattern and a second active pattern. The source/drain pattern comprises a first part on the first active pattern, a second part on the second active pattern, and a third part extending from the first part and along an upper portion of the first active pattern. The device isolation layer comprises a first outer segment on a sidewall of the first active pattern below the source/drain pattern. A lowermost level of a bottom surface of the third part may be lower than an uppermost level of a top surface of the first outer segment.Type: GrantFiled: January 21, 2019Date of Patent: January 19, 2021Inventors: Hyun-Kwan Yu, Min-Hee Choi
-
Publication number: 20200342157Abstract: A simulation method and system which can determine a predictable epitaxy time by accurately reflecting layout characteristics of a chip and characteristics of a source/drain formation process are provided.Type: ApplicationFiled: February 18, 2020Publication date: October 29, 2020Inventors: Alexander SCHMIDT, Dong-Gwan SHIN, Anthony PAYET, Hyoung Soo KO, Seok Hoon KIM, Hyun-Kwan YU, Si Hyung LEE, In Kook JANG
-
Publication number: 20200328290Abstract: A method of manufacturing a semiconductor device, the method including: forming, in a first region of a substrate, an active fin and a sacrificial gate structure intersecting the active fin; forming a first spacer and a second spacer on the substrate to cover the sacrificial gate structure; forming a mask in a second region of the substrate to expose the first region of the substrate; removing the second spacer from the first spacer in the first region of the substrate by using the mask; forming recesses at opposite sides of the sacrificial gate structure by removing portions of the active fin; forming a source and a drain in the recesses; and forming an etch-stop layer to cover both sidewalls of the sacrificial gate structure and a top surfaces of the source and drain.Type: ApplicationFiled: November 18, 2019Publication date: October 15, 2020Inventors: HYUN KWAN YU, Seung Hun LEE, Yang XU