Abstract: A vibration control pedestal and an installation method thereof are disclosed, including a method for reducing particles and vibrations while moving equipment, including semiconductor equipment, from one vibration control pedestal to another. The vibration control pedestal includes an equipment support body having at least two equipment support cells. A cell connection unit passes through side surfaces of the equipment support cells and connects the equipment support cells to each other. A bottom structure installed under the equipment support body braces the equipment support body.

Abstract: A receiver for ICI cancellation in a MIMO system is provided, in which a detection orderer determines a subcarrier detection order according to SINRs of subcarriers in an I-CMOS, a detector receives a vector on the subcarriers and a priori information from a decoder according to the subcarrier detection order and iteratively estimates the received vector using the a priori information, and the decoder decodes an ICI-cancelled signal according to the estimate.

Abstract: A vibration control pedestal and an installation method thereof are disclosed, including a method for reducing particles and vibrations while moving equipment, including semiconductor equipment, from one vibration control pedestal to another. The vibration control pedestal includes an equipment support body having at least two equipment support cells. A cell connection unit passes through side surfaces of the equipment support cells and connects the equipment support cells to each other. A bottom structure installed under the equipment support body braces the equipment support body.

Abstract: A receiver for ICI cancellation in a MIMO system is provided, in which a detection orderer determines a subcarrier detection order according to SINRs of subcarriers in an I-CMOS, a detector receives a vector on the subcarriers and a priori information from a decoder according to the subcarrier detection order and iteratively estimates the received vector using the a priori information, and the decoder decodes an ICI-cancelled signal according to the estimate.

Abstract: Chamber inserts and apparatuses for processing a substrate. In an example, the chamber insert may include a cylindrical body portion including an open top end portion and an open bottom end portion, a first protruding portion extending outwardly from a first portion of the cylindrical body portion, the first portion positioned circumferentially along the cylindrical body portion and a second protruding portion extending outwardly from a second portion of the cylindrical body portion, the second portion positioned circumferentially along less than all of the cylindrical body portion. In another example, the chamber insert may include a cylindrical body portion including an open top end portion and an open bottom end portion, the cylindrical body portion including a slit and at least one hole, the slit and the at least one hole positioned circumferentially along the cylindrical body portion and a first protruding portion extending outwardly from a first portion of the cylindrical body portion.