Patents by Inventor Hyun-Kyoo Shon

Hyun-Kyoo Shon has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • OVERLAY MEASUREMENT DEVICE AND METHOD, AND SYSTEM AND PROGRAM THEREFOR
    Publication number: 20240128112
    Abstract: An overlay measurement device includes a transmission and receipt part and a processor connecting to the transmission and receipt part electrically. The processor obtains data transmitted from a user terminal through the transmission and receipt part, analyzes a recipe included in the data, and performs optimization of measurement options of a wafer, based on the recipe, after the recipe is analyzed.
    Type: Application
    Filed: July 28, 2023
    Publication date: April 18, 2024
    Applicant: AUROS TECHNOLOGY, INC.
    Inventors: Sol-Lee HWANG, Hee-Chul LIM, Dong-Won JUNG, Min-Ho LEE, Hyun-Kyoo SHON
  • Computer-readable storage medium recording data structure for storing data controlling operation of overlay measurement device and overlay measurement device therefor
    Patent number: 11960214
    Abstract: There are provided a computer-readable storage medium and an overlay measurement device therefor that records a data structure for storing data controlling an operation of an overlay measurement device. In a computer-readable storage medium that records a data structure for storing data controlling an operation of an overlay measurement device in one embodiment, the data includes information of a recipe that is input to allow the overlay measurement device to measure characteristics of a wafer through a manager program installed in a user terminal, and unique information of the overlay measurement device.
    Type: Grant
    Filed: May 3, 2023
    Date of Patent: April 16, 2024
    Assignee: AUROS TECHNOLOGY, INC.
    Inventors: Sol-Lee Hwang, Dong-Won Jung, Hee-Chul Lim, Hyun-Kyoo Shon, Min-Ho Lee