Abstract: The present invention relates to a centrifugal force-based nanoparticle separation apparatus and method. Specifically, the present invention is based on having a low centrifugal force and a small size, and may thus separate nanovesicles unrelated to antibody specificity in a short time and without using an ultracentrifuge. Further, the present invention requires no additional professional personnel and enables accurate fluid measurement by integrating and automating all processes after sample injection, and may thus reduce the loss of nanovesicles.

Abstract: The present invention relates to a centrifugal force-based nanoparticle separation apparatus and method. Specifically, the present invention is based on having a low centrifugal force and a small size, and may thus separate nanovesicles unrelated to antibody specificity in a short time and without using an ultracentrifuge. Further, the present invention requires no additional professional personnel and enables accurate fluid measurement by integrating and automating all processes after sample injection, and may thus reduce the loss of nanovesicles.

Abstract: Disclosed are a method for depositing a titanium oxide (TiO2) layer and a method for fabricating a capacitor by using the same. The method for forming the TiO2 layer includes the steps of: a) adsorbing titanium hydride (TiH2) on a wafer loaded into a chamber by supplying TiH2 to the chamber; b) purging out the non-adsorbed TiH2; c) forming an TiO2 layer on the wafer by inducing a reaction between the TiH2 and the oxygen source with supplying an oxygen source as a reaction gas to the chamber; and d) purging out the non-reacted oxygen source and a by-product. The method for fabricating the capacitor includes the steps of: forming a lower electrode on a wafer; depositing a titanium oxide (TiO2) layer on the lower electrode by using titanium hydride (TiH2) as a precursor; and forming an upper electrode on the TiO2 layer.