Abstract: Disclosed is a power divider circuit providing a mutual inductance and including a first primary inducing element having a first terminal connected with a first output port and a second terminal connected with a second primary inducing element having a first terminal connected with a second output port and a second terminal connected with the first primary inducing element and magnetically and mutually coupled with the first primary inducing element, a sub inducing element having a first terminal connected with an input port and a second terminal connected with the second terminal of the first primary inducing element and the second terminal of the second primary inducing element, and an isolation network connected between the first output port and the second output port. The sub inducing element is magnetically and mutually coupled with each of the first primary inducing element and the second primary inducing element.

Abstract: Disclosed is a power divider circuit providing a mutual inductance and including a first primary inducing element having a first terminal connected with a first output port and a second terminal connected with a second primary inducing element having a first terminal connected with a second output port and a second terminal connected with the first primary inducing element and magnetically and mutually coupled with the first primary inducing element, a sub inducing element having a first terminal connected with an input port and a second terminal connected with the second terminal of the first primary inducing element and the second terminal of the second primary inducing element, and an isolation network connected between the first output port and the second output port. The sub inducing element is magnetically and mutually coupled with each of the first primary inducing element and the second primary inducing element.

Abstract: A chiller for etching equipment for processing a semiconductor includes: a chuck for controlling a temperature of a semiconductor wafer, a coolant pipeline connected to the chuck, a coolant tank connected to the coolant pipeline, an evaporator in the coolant tank, a refrigerant in the evaporator, a compressor for compressing refrigerant flowing from the evaporator, a condenser for condensing the compressed refrigerant from the compressor, and an electronically controlled expansion valve connected to the condenser to receive compressed refrigerant, and connected to the evaporator for feeding the expanded refrigerant into evaporator.

Abstract: Disclosed herein is an adsorbent for removing mercury, which comprises sulfided iron compounds containing oxygen. In the adsorbent, iron compounds containing oxygen are sulfided to accumulate sulfur therein, thereby removing gaseous mercury.