Patents by Inventor HYUN-SEOK UHM

HYUN-SEOK UHM has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of generating a pattern on a photomask using a plurality of beams and pattern generator for performing the same
    Patent number: 9989860
    Abstract: A pattern generating method includes, generating a first bit map from inputted pattern data. Characteristics of a plurality of beams for exposing a pattern on a substrate are analyzed, each of the plurality of beams being designated to correspond to one of a plurality of grids in the first bit map. The pattern data is corrected such that at least one of the plurality of beams is designated to expose at least a portion of the pattern on the substrate. A second bit map is generated from the corrected pattern data. The substrate is patterned using the plurality of beams according to the designation of the second bit map.
    Type: Grant
    Filed: September 2, 2016
    Date of Patent: June 5, 2018
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sang-Hee Lee, Hyun-Seok Uhm, Il-Yong Jang
  • METHOD OF GENERATING A PATTERN ON A PHOTOMASK USING A PLURALITY OF BEAMS AND PATTERN GENERATOR FOR PERFORMING THE SAME
    Publication number: 20170115577
    Abstract: A pattern generating method includes, generating a first bit map from inputted pattern data. Characteristics of a plurality of beams for exposing a pattern on a substrate are analyzed, each of the plurality of beams being designated to correspond to one of a plurality of grids in the first bit map. The pattern data is corrected such that at least one of the plurality of beams is designated to expose at least a portion of the pattern on the substrate. A second bit map is generated from the corrected pattern data. The substrate is patterned using the plurality of beams according to the designation of the second bit map.
    Type: Application
    Filed: September 2, 2016
    Publication date: April 27, 2017
    Inventors: SANG-HEE LEE, HYUN-SEOK UHM, IL-YONG JANG