Abstract: A vaporizer includes a main body including a first body and a second body. The first body has an upper portion narrowing in a direction of a height of the first body and the second body has a cavity in which the first body is positioned. A mixing chamber is between the first and second bodies. The second body includes a carrier gas injection path connected to a carrier gas inlet formed in an upper portion of the mixing chamber. The carrier gas injection path carries a carrier gas. A source material injection path is connected to a source material inlet formed in the mixing chamber. The source material injection path carries a liquid source material. A discharge is connected to an outlet formed in a lower portion of the mixing chamber. A mixed fluid including the carrier gas and the liquid source material is discharged through the discharge path.

Abstract: A vaporizer includes a main body including a first body and a second body. The first body has an upper portion narrowing in a direction of a height of the first body and the second body has a cavity in which the first body is positioned. A mixing chamber is between the first and second bodies. The second body includes a carrier gas injection path connected to a carrier gas inlet formed in an upper portion of the mixing chamber. The carrier gas injection path carries a carrier gas. A source material injection path is connected to a source material inlet formed in the mixing chamber. The source material injection path carries a liquid source material. A discharge is connected to an outlet formed in a lower portion of the mixing chamber. A mixed fluid including the carrier gas and the liquid source material is discharged through the discharge path.

Abstract: A probe card handling carriage is applicable to various working environments. The probe card handling carriage includes a main body provided to be travelable on the ground, a drawer unit provided to be movable in a forward and backward direction with respect to the main body, and a transfer robot installed on the drawer unit to transfer a probe card.

Abstract: Disclosed herein are a robot joint driving method, computer-readable medium, and device assembly which conducts motions similar to those of humans, and a robot having the same. These motions are achieved by arranging joint driving devices suited to characteristics of respective joints. The robot joint driving device assembly includes a tendon-type joint driving device using a wire, and a harmonic drive-type joint driving device using a gear reduction method. The tendon-type joint driving device is used to drive a rotary joint requiring high back-drivability, and the harmonic drive-type joint driving device is used to drive a rotary joint requiring high rigidity and high precision.

Abstract: The present inventive concepts relate to an apparatus having a multi-jointed arm. The apparatus having a multi-jointed arm may include a body; a multi-jointed arm having a first link rotatably combined with the body at a first joint and a second link rotatably combined with the first link at a second joint; and a compensator generating a compensation moment cancelling out a moment being generated by a weight of the multi-jointed arm. The compensator includes a compensation load generating the compensation moment, and a compensation link connecting the compensation load and the multi-jointed arm so that the compensation load and the multi-jointed arm are on opposite sides of the first joint.

Abstract: A robot joint driving apparatus has an improved structure, a robot having the same, and a cable linkage method of the robot joint driving apparatus. In the robot joint driving apparatus, lines of a cable to drive a robot joint unit are connected plural times in parallel, thereby increasing torsional stiffness of the robot joint unit. Further, a cable fixing unit is provided on an output pulley, thereby preventing slippage of the cable on the output pulley. Moreover, the overall size of the robot joint driving apparatus is reduced due to an improved power transmission structure from a driving motor to the output pulley.

Abstract: Disclosed are a robot joint driving apparatus and a robot having the same, capable of minimizing tension of a wire applied to a movable member by installing an idle pulley in a power transmission structure using a ball screw apparatus and the wire. The robot joint driving apparatus includes a reversible drive motor, a pair of movable members performing a linear movement according to rotation of the reversible drive motor, a wire connected to the movable members from both directions of the movable members, an idle pulley rotatably installed at one side of the wire, a joint part rotatably installed at an opposite side of the wire, and an adjustment unit to adjust tension of the wire.

Abstract: A robot hand, which minimizes the number of actuators and adjusts the bending angles of joints through torque limiters to flexibly and finely control finger units, and a humanoid robot having the robot hand. The robot hand includes a torque limiter disposed on at least any one joint of a plurality of joints to link another joint of the plurality of joints with the any one joint through a power transmission member.

Abstract: A robot joint driving apparatus has an improved structure, a robot having the same, and a cable linkage method of the robot joint driving apparatus. In the robot joint driving apparatus, lines of a cable to drive a robot joint unit are connected plural times in parallel, thereby increasing torsional stiffness of the robot joint unit. Further, a cable fixing unit is provided on an output pulley, thereby preventing slippage of the cable on the output pulley. Moreover, the overall size of the robot joint driving apparatus is reduced due to an improved power transmission structure from a driving motor to the output pulley.

Abstract: Disclosed herein are a robot joint driving method, computer-readable medium, and device assembly which conducts motions similar to those of humans, and a robot having the same. These motions are achieved by arranging joint driving devices suited to characteristics of respective joints. The robot joint driving device assembly includes a tendon-type joint driving device using a wire, and a harmonic drive-type joint driving device using a gear reduction method. The tendon-type joint driving device is used to drive a rotary joint requiring high back-drivability, and the harmonic drive-type joint driving device is used to drive a rotary joint requiring high rigidity and high precision.

Abstract: Disclosed are a robot joint driving apparatus and a robot having the same, capable of minimizing tension of a wire applied to a movable member by installing an idle pulley in a power transmission structure using a ball screw apparatus and the wire. The robot joint driving apparatus includes a reversible drive motor, a pair of movable members performing a linear movement according to rotation of the reversible drive motor, a wire connected to the movable members from both directions of the movable members, an idle pulley rotatably installed at one side of the wire, a joint part rotatably installed at an opposite side of the wire, and an adjustment unit to adjust tension of the wire.

Abstract: A semiconductor equipment control system and method is provided. The semiconductor equipment control system preferably includes semiconductor equipment having a process recipe stored therein and a host connected to the semiconductor equipment through a network. The host preferably includes a database in which a reference recipe is stored and is preferably configured to receive and compare a final modification time of the process recipe with a final modification time of the reference recipe. When the final modifications times are equal, the host is preferably configured to instruct the semiconductor equipment to perform a process according to the process recipe. When the final modification times are different, the host is preferably configured to check a recipe body of the process recipe against a recipe body of the reference recipe to determine if the process recipe is within an established tolerance.

Abstract: A robot hand, which minimizes the number of actuators and adjusts the bending angles of joints through torque limiters to flexibly and finely control finger units, and a humanoid robot having the robot hand. The robot hand includes a torque limiter disposed on at least any one joint of a plurality of joints to link another joint of the plurality of joints with the any one joint through a power transmission member.

Abstract: A semiconductor equipment control system and method is provided. The semiconductor equipment control system preferably includes semiconductor equipment having a process recipe stored therein and a host connected to the semiconductor equipment through a network. The host preferably includes a database in which a reference recipe is stored and is preferably configured to receive and compare a final modification time of the process recipe with a final modification time of the reference recipe. When the final modifications times are equal, the host is preferably configured to instruct the semiconductor equipment to perform a process according to the process recipe. When the final modification times are different, the host is preferably configured to check a recipe body of the process recipe against a recipe body of the reference recipe to determine if the process recipe is within an established tolerance.