Abstract: A method of manufacturing a semiconductor device, the method including forming a photoresist material layer on a lower film, the photoresist material layer including a crosslinking molecule having a molecular weight of about 1,000 to about 4,000; exposing a partial region of the photoresist material layer; removing an unexposed portion of the photoresist material layer to form a photoresist pattern; and processing the lower film using the photoresist pattern, wherein the crosslinking molecule includes a perfluoro alkyl moiety, the perfluoro alkyl moiety including a carbon-fluorine bond that dissociates in response to the exposing of the partial region of the photoresist material layer.

Abstract: There is provided a phase locked loop circuit including a phase-frequency detection circuit configured to receive a reference clock signal and a feedback clock signal having a first phase difference from each other, adjust a phase gain based on first phase difference, and generate a first and a second control signals based on the phase gain, a lock detection circuit configured to generate a lock detection signal based on the first phase difference, a charge pump circuit configured to generate a loop filter input signal based on the first and second control signals, a loop filter configured to adjust impedance based on the activated lock detection signal and generate a loop filter output signal based on the adjusted impedance, an oscillator configured to generate a clock signal based on the loop filter output signal, and a divider configured to generate the feedback clock signal by dividing the clock signal.

Abstract: Methods and systems for synthesizing multicompartment capsules are disclosed, as well as multicompartment polymer capsules formed in accordance with disclosed techniques. At least one plurality of polymer capsules are formed via a capsule-forming process. A feed solution and a reservoir solution are provided, each comprising a biopolymer. The feed solution biopolymer and the reservoir solution biopolymer have opposite charges. Droplets of the feed solution are introduced into the reservoir solution, thereby forming via electrostatic complexation a plurality of polymer capsules. At least a portion of the resulting polymer capsules are then encapsulated in a larger polymer capsule via a similar process, wherein the feed solution utilized for the encapsulation process also comprises the formed smaller capsules.

Abstract: A method of manufacturing a semiconductor device, the method including forming a photoresist material layer on a lower film, the photoresist material layer including a crosslinking molecule having a molecular weight of about 1,000 to about 4,000; exposing a partial region of the photoresist material layer; removing an unexposed portion of the photoresist material layer to form a photoresist pattern; and processing the lower film using the photoresist pattern, wherein the crosslinking molecule includes a perfluoro alkyl moiety, the perfluoro alkyl moiety including a carbon-fluorine bond that dissociates in response to the exposing of the partial region of the photoresist material layer.

Abstract: Provided are a resist composition and a method of forming a pattern using the same. According to the inventive concept, the resist composition may include a copolymer represented by Formula 1 below.

Abstract: Methods and systems for synthesizing multicompartment capsules are disclosed, as well as multicompartment polymer capsules formed in accordance with disclosed techniques. At least one plurality of polymer capsules are formed via a capsule-forming process. A feed solution and a reservoir solution are provided, each comprising a biopolymer. The feed solution biopolymer and the reservoir solution biopolymer have opposite charges. Droplets of the feed solution are introduced into the reservoir solution, thereby forming via electrostatic complexation a plurality of polymer capsules. At least a portion of the resulting polymer capsules are then encapsulated in a larger polymer capsule via a similar process, wherein the feed solution utilized for the encapsulation process also comprises the formed smaller capsules.

Abstract: Provided are a system and method for detecting and predicting anomalies based on analysis of time-series data. According to an embodiment of the present disclosure, an abnormality detecting and predicting system includes a database configured to store past case data related to a state of a monitored object; a data collector configured to collect time-series status information of the monitored object; an abnormality detector configured to compare the status information with an abnormality detecting reference in a preset detecting interval and detect an occurrence of an abnormality of the monitored object; a similar case selector configured to select a similar case having a highest degree of similarity to the status information among the past case data when the occurrence of an abnormality is detected by the abnormality detector; and a predictor configured to predict proliferation or diminishing of a detected abnormality using the similar case and an abnormality proliferation predicting reference.

Abstract: Provided are a system and method for detecting and predicting anomalies based on analysis of time-series data. According to an embodiment of the present disclosure, an abnormality detecting and predicting system includes a database configured to store past case data related to a state of a monitored object; a data collector configured to collect time-series status information of the monitored object; an abnormality detector configured to compare the status information with an abnormality detecting reference in a preset detecting interval and detect an occurrence of an abnormality of the monitored object; a similar case selector configured to select a similar case having a highest degree of similarity to the status information among the past case data when the occurrence of an abnormality is detected by the abnormality detector; and a predictor configured to predict proliferation or diminishing of a detected abnormality using the similar case and an abnormality proliferation predicting reference.

Abstract: A substrate treating apparatus is provided. The substrate treating apparatus includes a loading/unloading unit, a process unit in which a substrate treating process is performed, a loadlock unit disposed between the loading/unloading unit and the process unit, and a carrying member transferring a substrate between the process unit and the loadlock unit. Herein, the carrying member is provided in the process unit and the loadlock unit, and the loading/unloading unit, the loadlock unit, and the process unit are sequentially disposed.

Abstract: A substrate treating apparatus is provided. The substrate treating apparatus includes a loading/unloading unit, a process unit in which a substrate treating process is performed, a loadlock unit disposed between the loading/unloading unit and the process unit, and a carrying member transferring a substrate between the process unit and the loadlock unit. Herein, the carrying member is provided in the process unit and the loadlock unit, and the loading/unloading unit, the loadlock unit, and the process unit are sequentially disposed.