Patents by Inventor Hyun-Yong Yu

Hyun-Yong Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD FOR FORMING STAIR-STEP STRUCTURES
    Publication number: 20120149201
    Abstract: A method for forming a stair-step structure in a substrate is provided. An organic mask is formed over the substrate. A hardmask with a top layer and sidewall layer is formed over the organic mask. The sidewall layer of the hard mask is removed while leaving the top layer of the hardmask. The organic mask is trimmed. The substrate is etched. The forming the hardmask, removing the sidewall layer, trimming the organic mask, and etching the substrate are repeated a plurality of times.
    Type: Application
    Filed: December 14, 2010
    Publication date: June 14, 2012
    Applicant: LAM RESEARCH CORPORATION
    Inventors: Qian Fu, Hyun-Yong Yu
  • METHOD FOR FORMING STAIR-STEP STRUCTURES
    Publication number: 20120149203
    Abstract: A method for forming a stair-step structure in a substrate is provided. An organic mask is formed over the substrate. A hardmask with a top layer and sidewall layer is formed over the organic mask. The sidewall layer of the hard mask is removed while leaving the top layer of the hardmask. The organic mask is trimmed. The hardmask is removed. The substrate is etched. The forming the hardmask, removing the sidewall layer, trimming the organic mask, and etching the substrate are repeated a plurality of times.
    Type: Application
    Filed: July 19, 2011
    Publication date: June 14, 2012
    Applicant: LAM RESEARCH CORPORATION
    Inventors: Qian Fu, Ce Qin, Hyun-Yong Yu