Patents by Inventor Hyunbae Kim

Hyunbae Kim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12002651
    Abstract: A wafer processing apparatus includes a chamber, and a voltage waveform generator configured to accelerate plasma ions of the chamber, the voltage waveform generator includes: a pulse circuit configured to apply a chamber voltage, which is a pulse voltage, to the chamber by adjusting a chamber current applied to the chamber; and a slope circuit configured to generate a slope in an on-duty of the chamber voltage, which is the pulse voltage, and the pulse circuit includes a first inductive element configured to store a first internal current.
    Type: Grant
    Filed: January 26, 2021
    Date of Patent: June 4, 2024
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Hyunbae Kim, Hyejin Kim, Chanhee Park
  • Publication number: 20240170255
    Abstract: Provided is a voltage waveform control method comprising generating a voltage waveform of a non-sinusoidal wave comprising a pulse period having a positive bias voltage, a ramp period having a negative bias voltage, a first transition period changing from the pulse period to the ramp period, and a second transition period changing from the ramp period to the pulse period, adjusting a length of a negative voltage period having the negative bias voltage during a period of the voltage waveform to be at most 20% of a total length of the period, adjusting a slope of the ramp period, and outputting an adjusted voltage waveform based on the adjusted length of the negative voltage period and the adjusted slope of the ramp period, where the adjusting the length of the negative voltage period comprises adjusting a length of the first transition period and a length of the second transition period.
    Type: Application
    Filed: November 3, 2023
    Publication date: May 23, 2024
    Applicant: ASMSUNG ELECTRONICS CO., LTD.
    Inventors: Hyong seo YOON, Hyunbae KIM, Yeonguk KIM, Yonghee KIM, Hyungjun KIM, Jina JEON, Jumghyun CHO, Sungwook HONG, Wonsub HWANG
  • Publication number: 20240128055
    Abstract: A method of manufacturing a semiconductor device includes placing a wafer in a plasma chamber, the chamber including a first power generator configured to generate plasma ions in the chamber, and a second power generator configured to accelerate the plasma ions toward the wafer, generating a radio frequency (RF) signal having a repeated periodic sinusoidal waveform in an on state and a steady off state by the first power generator, and generating a direct current (DC) bias signal having a repeated periodic non-sinusoidal waveform in an on state and a steady off state by the second power generator. The RF signal and the DC bias signal are offset from each other. The method further includes performing a plasma process on a layer on the wafer, using the RF signal and DC bias signal.
    Type: Application
    Filed: August 11, 2023
    Publication date: April 18, 2024
    Inventors: Hyunbae Kim, Jihwan Kim, Sangki Nam, Daeun Son, Seungbo Shim, Juho Lee, Hyunjae Lee, Hyunhak Jeong
  • Patent number: 11705306
    Abstract: A variable frequency and non-sinusoidal power generator includes a pulse module circuit, a slope module circuit, and first and second cooling systems. The pulse module circuit and the slope module circuit includes control switches, and generates at least one of a output currents and a output voltages by selectively turning on/off the control switches based on control signals. The first and second cooling systems are disposed at first and second sides of the control switches. A bias power having a variable frequency and a non-sinusoidal waveform is generated based on the control signals, at least one of the output currents and the output voltages.
    Type: Grant
    Filed: September 9, 2021
    Date of Patent: July 18, 2023
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Hyunbae Kim, Hyunjae Lee, Youngdo Kim, Hyejin Kim, Sangki Nam, Chanhee Park, Minho Jung
  • Publication number: 20230075642
    Abstract: A high voltage power supply apparatus includes a high voltage direct current voltage source, a power switch configured to apply an output of the high voltage direct current voltage source to process equipment, and a sensing circuit unit including a sensor unit including a sensor and at least one operational amplifier, a reference voltage detection unit connected to a node between the sensor and the at least one operational amplifier, and a digital signal processing unit, wherein the sensing circuit unit is connected to an output terminal through which an output of the high voltage direct current voltage source is applied to the process equipment.
    Type: Application
    Filed: September 1, 2022
    Publication date: March 9, 2023
    Inventors: Jihwan KIM, Hyunbae KIM, Hongseung CHO, Seungbo SHIM, Sungyeol KIM
  • Publication number: 20220262599
    Abstract: A variable frequency and non-sinusoidal power generator includes a pulse module circuit, a slope module circuit, and first and second cooling systems. The pulse module circuit and the slope module circuit includes control switches, and generates at least one of a output currents and a output voltages by selectively turning on/off the control switches based on control signals. The first and second cooling systems are disposed at first and second sides of the control switches. A bias power having a variable frequency and a non-sinusoidal waveform is generated based on the control signals, at least one of the output currents and the output voltages.
    Type: Application
    Filed: September 9, 2021
    Publication date: August 18, 2022
    Applicant: Samsung Electronics Co., Ltd.
    Inventors: Hyunbae KIM, Hyunjae LEE, Youngdo KIM, Hyejin KIM, Sangki NAM, Chanhee PARK, Minho JUNG
  • Publication number: 20210407769
    Abstract: A wafer processing apparatus includes a chamber, and a voltage waveform generator configured to accelerate plasma ions of the chamber, the voltage waveform generator includes: a pulse circuit configured to apply a chamber voltage, which is a pulse voltage, to the chamber by adjusting a chamber current applied to the chamber; and a slope circuit configured to generate a slope in an on-duty of the chamber voltage, which is the pulse voltage, and the pulse circuit includes a first inductive element configured to store a first internal current.
    Type: Application
    Filed: January 26, 2021
    Publication date: December 30, 2021
    Applicant: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Hyunbae Kim, Hyejin Kim, Chanhee Park
  • Patent number: 10108243
    Abstract: Smart USB plug detection is disclosed. In some embodiments, a battery charger identification chip includes circuitry configured to determine whether an external USB device has been plugged into a USB port of an associated system while the system is in a sleep mode and includes a pin configured to output a control signal indicating whether an external USB device is plugged into the system, wherein when an external USB device is plugged into the system the control signal facilitates powering on a current limit switch that is otherwise powered off during the sleep mode and wherein the current limit switch facilitates regulated delivery of current to the plugged in external USB device.
    Type: Grant
    Filed: September 3, 2013
    Date of Patent: October 23, 2018
    Assignee: Silego Technology, Inc.
    Inventors: Cheng-Hao Chen, Hyunbae Kim, Hyuntak Shin
  • Publication number: 20120008871
    Abstract: An image output correcting device includes an output unit to process a first image and to output the processed first image as a second image, an input unit to receive a part of the second image output, a computation unit to compute a depth information of a surface on which the image is outputted by comparing the first image and the second image input to the input unit, and a control unit to generate a third image using the depth information to be outputted. A method for correcting an image output on a surface using depth information includes processing a first image, outputting a second image, computing depth information of a surface to which the second image is outputted by comparing the first image and the second image, and generating a third image using the depth information and outputting the third image.
    Type: Application
    Filed: February 15, 2011
    Publication date: January 12, 2012
    Applicant: Pantech Co., Ltd.
    Inventor: Hyunbae KIM
  • Patent number: 6963992
    Abstract: An apparatus comprising a circuit that may be configured to (i) change a frequency of one or more first signals in response to a second signal and (ii) generate a third signal in response to either the second signal or a predetermined time period expiring.
    Type: Grant
    Filed: September 28, 2000
    Date of Patent: November 8, 2005
    Assignee: Cypress Semiconductor Corp.
    Inventors: Paul Lap Tak Cheng, Kuang-Yu Chen, Frank Hwang, Hueng-Cheng Eric Chen, Hyunbae Kim
  • Patent number: 6882187
    Abstract: A line driver and a method for driving a line are disclosed. The line driver includes a first current device configured to initiate a change in the state of the line and a second current device configured to substantially complete the change. The first current device provides a first current and the second current device provides a second current that is smaller than the first current.
    Type: Grant
    Filed: July 25, 2003
    Date of Patent: April 19, 2005
    Assignee: Silego Technology, Inc.
    Inventors: Hyunbae Kim, Chen Yu Wang, Kuang-Yu Chen