Abstract: The present invention discloses a burner for a scrubber comprising a housing including a combustion zone to which waste gas is entered, the combustion zone having an internal central region and an opened lower portion, the housing including a mixing zone for mixing an oxidizer and fuel entered thereinto, the mixing zone being disposed along an outer side of the combustion zone and formed into a ring shape; and a metal cartridge disposed between the combustion zone and the mixing zone and provided with apertures for supplying the oxidizer and fuel mixed in the mixing zone to the combustion zone.

Abstract: The present invention discloses a burner for a scrubber comprising a housing including a combustion zone to which waste gas is entered, the combustion zone having an internal central region and an opened lower portion, the housing including a mixing zone for mixing an oxidizer and fuel entered thereinto, the mixing zone being disposed along an outer side of the combustion zone and formed into a ring shape; and a metal cartridge disposed between the combustion zone and the mixing zone and provided with apertures for supplying the oxidizer and fuel mixed in the mixing zone to the combustion zone.

Abstract: Disclosed is a scrubber for processing semiconductor waste gas produced in a semiconductor fabricating process, wherein the scrubber burns the waste gas with a flame of a high temperature, filters and captures particles produced after the waste gas is burnt, and discharges particle-filtered waste gas to the atmosphere.

Abstract: An apparatus for supplying a chemical solution includes a mother tank storing a chemical solution, an intermediate tank disposed in a higher position than the mother tank with a first height difference (h), and the intermediate tank is adapted to receive a fixed amount of chemical solution from the mother tank. The apparatus further includes a bubbling tank disposed in a higher position than the intermediate tank with a second height difference (h?) and the bubbling tank is adapted to receive the fixed amount of the chemical solution from the intermediate tank.