Abstract: A plasma treatment apparatus includes a light generator that generates light, a chamber that receives the light generated from the light generator, an optical element provided between the light generator and the chamber, a light detector that detects the light reflected in the chamber, and a controller connected to the light generator and the light detector. The chamber includes an electrostatic chuck provided in a lower portion of the chamber, an edge ring provided around the electrostatic chuck, an outer wall for sealing an inner space of the chamber, and a gas supply that injects a process gas into the chamber. The optical element branches the generated light to irradiate branched light to different regions of the chamber.

Abstract: A plasma treatment apparatus includes a light generator that generates light, a chamber that receives the light generated from the light generator, an optical element provided between the light generator and the chamber, a light detector that detects the light reflected in the chamber, and a controller connected to the light generator and the light detector. The chamber includes an electrostatic chuck provided in a lower portion of the chamber, an edge ring provided around the electrostatic chuck, an outer wall for sealing an inner space of the chamber, and a gas supply that injects a process gas into the chamber. The optical element branches the generated light to irradiate branched light to different regions of the chamber.

Abstract: A test system including a test device configured to transmit an input signal and a control signal to at least one complementary metal-oxide semiconductor (CMOS) image sensor via a probe card, and an interface board configured to map the probe card and the test device. The interface board includes an output receiver configured to receive an image signal from the at least one CMOS image sensor and transform the image signal into image data.

Abstract: Disclosed herein are a system to test an electronic part and a method of controlling the same, which are capable of automatically detecting a position of a socket according to a variation in a position of the socket to efficiently test the electronic part. The system to test an electronic part using a robot to automatically test the electronic part includes: a distance measuring unit measuring a distance between a socket mounted on a substrate to test the electronic part and a reference block to provide a reference position; a position measuring unit detecting positional information of the reference block; and a controller calculating positional information of the socket using the measured distance between the socket and the reference block on the basis of the detected positional information of the reference block and controlling the robot using the calculated positional information of the socket.

Abstract: Disclosed herein are a system to test an electronic part and a method of controlling the same, which are capable of automatically detecting a position of a socket according to a variation in a position of the socket to efficiently test the electronic part. The system to test an electronic part using a robot to automatically test the electronic part includes: a distance measuring unit measuring a distance between a socket mounted on a substrate to test the electronic part and a reference block to provide a reference position; a position measuring unit detecting positional information of the reference block; and a controller calculating positional information of the socket using the measured distance between the socket and the reference block on the basis of the detected positional information of the reference block and controlling the robot using the calculated positional information of the socket.