Abstract: A photoacid generator including an anion having a novel structure having a specific polar functional group such as a sulfonate group is provided. A photoresist composition comprising the same and a method for forming a photoresist pattern are also provided.

Abstract: A salt compound includes an anion having a specific structure represented by Chemical Formula 1, and a cation represented by Chemical Formula 2. A quencher includes the salt compound; and a photoresist composition includes the salt compound.

Abstract: Provided are an apparatus for diagnosing a disease and a method for diagnosing same. The apparatus includes a pump for pumping respiratory gas, a first pre-treatment portion connected to the pump and removing moisture and bad breath in the respiratory gas, and a volatile organic compound detector connected between the first pre-treatment portion and the pump and detecting volatile organic compounds in the respiratory gas.

Abstract: Provided are nanoparticles for sensing phosphate, a method for manufacturing the same, and a membrane for sensing phosphate including the same. The nanoparticles for sensing phosphate include a coordination polymer in which lanthanide metal ions and ligands are coordinated, and a polymer.

Abstract: Disclosed are a disease diagnosis device and a diagnosis method thereof. The disease diagnosis device includes a pump for pumping a respiratory gas, a first pre-treatment portion connected to the pump and removing moisture and bad breath in the respiratory gas, and a volatile organic compound (VOC) detection portion connected between the first pre-treatment portion and the pump to detect VOCs in the respiratory gas.

Abstract: The present invention relates to a fluorescence sensor for measuring microalgae and a method of operating the same. The fluorescence sensor for measuring the microalgae includes a fluorescence measurement unit including a light emitter configured to irradiate excitation light onto a measurement region and a detector configured to measure fluorescence emitted from the measurement region, an algae control unit configured to form a node and an antinode of an ultrasonic standing wave in the measurement region to control an algal density, and a signal processing unit configured to calculate the algal density using fluorescence intensity signals according to an operation mode of the algae control unit.

Abstract: An atmospheric pressure plasma device is disclosed. The atmospheric pressure plasma device includes a conductive tube connected to a power device, an electrode formed as a plate and receiving power supplied from the conductive tube and a dielectric configured to control discharge instability by being formed to surround a side surface of the electrode.

Abstract: An atmospheric pressure plasma device is disclosed. The atmospheric pressure plasma device includes a conductive tube connected to a power device, an electrode formed as a plate and receiving power supplied from the conductive tube and a dielectric configured to control discharge instability by being formed to surround a side surface of the electrode.

Abstract: The present invention relates to a fluorescence sensor for measuring microalgae and a method of operating the same. The fluorescence sensor for measuring the microalgae includes a fluorescence measurement unit including a light emitter configured to irradiate excitation light onto a measurement region and a detector configured to measure fluorescence emitted from the measurement region, an algae control unit configured to form a node and an antinode of an ultrasonic standing wave in the measurement region to control an algal density, and a signal processing unit configured to calculate the algal density using fluorescence intensity signals according to an operation mode of the algae control unit.

Abstract: Disclosed are a sensor fiber and a method of manufacturing the same. The method of manufacturing a sensor fiber comprises providing a mixture solution including a detection member, submerging a core fiber in the mixture solution, and coating the detection member on a surface of the core fiber by stirring the mixture solution in which the core fiber is submerged. The detection member comprises a transition metal chalcogenide.

Abstract: Disclosed is an electrochemical gas sensor using micro electro mechanical systems (MEMS). The MEMS electrochemical gas sensor includes: a substrate a lower central region of which is etched by a predetermined thickness; a first insulation film formed on the substrate; a heat emitting resistance body formed on the first insulation film; a second insulation film formed on the heat emitting resistance body; a reference electrode formed in an upper central region of the second insulation film; a solid electrolyte formed on the reference electrode; and a detection electrode formed on the solid electrolyte.

Abstract: Disclosed are a gas sensor, and a method of manufacturing and using the same. The method includes: forming a detection material on a heater; coating an encapsulant on the detection material; and heating the heater to remove the encapsulant from the detection material when the gas sensor is operated.

Abstract: Provided are a dual-side micro gas sensor and a method of fabricating the same. The sensor may include an elastic layer, a heat-generating resistor layer on the elastic layer, an interlayered insulating layer on the heat-generating resistor layer, an upper sensing layer on the interlayered insulating layer, and a lower sensing layer provided below the elastic layer to face the heat-generating resistor layer, thereby reducing heat loss of the heat-generating resistor layer.

Abstract: Provided is a catalytic combustible gas sensor using a porous membrane embedded micro-heater and a micro electro mechanical system (MEMS) technology. The present disclosure provides a gas sensor that is structurally, mechanically, and electrically stable, and has a simple device fabrication process in a MEMS catalytic combustible gas sensor that is miniaturized and also consumes a significantly small amount of power by puncturing a plurality of holes in membranes, a heating resistor, and a sensing electrode, by etching and thereby thermally isolating a substrate by a predetermined thickness through the plurality of holes, and by including a sensing structure formed using a sensing material and a compensation structure formed using a compensation material.

Abstract: Provided are a dual-side micro gas sensor and a method of fabricating the same. The sensor may include an elastic layer, a heat-generating resistor layer on the elastic layer, an interlayered insulating layer on the heat-generating resistor layer, an upper sensing layer on the interlayered insulating layer, and a lower sensing layer provided below the elastic layer to face the heat-generating resistor layer, thereby reducing heat loss of the heat-generating resistor layer.

Abstract: Disclosed are an MEMS type semiconductor gas sensor using a microheater having many holes and a method for manufacturing the same. The MEMS type semiconductor gas sensor includes: a substrate of which a central region is etched with a predetermined thickness; a second membrane formed at an upper portion of the central region of the substrate and having many holes; a heat emitting resistor formed on the second membrane and having many holes; a first membrane formed on the second membrane including the heat emitting resistor and having many holes; a sensing electrode formed on the first membrane and having many holes; and a sensing material formed on the sensing electrode.

Abstract: Provided are a micro-valve structure and a lab-on-a-chip module that include a polymer actuator. The micro-valve structure may include a flexible structure disposed on a substrate, and the polymer actuator inserted into the flexible structure. At this time, the flexible structure has a valve portion defining a microchannel and the polymer actuator is separated from the microchannel by the flexible structure. In addition, the polymer actuator is formed to change a width of the microchannel by controlling a displacement of the valve portion.

Abstract: Disclosed are a gas sensor, and a method of manufacturing and using the same. The method includes: forming a detection material on a heater; coating an encapsulant on the detection material; and heating the heater to remove the encapsulant from the detection material when the gas sensor is operated.

Abstract: Disclosed is an electrochemical gas sensor using micro electro mechanical systems (MEMS). The MEMS electrochemical gas sensor includes: a substrate a lower central region of which is etched by a predetermined thickness; a first insulation film formed on the substrate; a heat emitting resistance body formed on the first insulation film; a second insulation film formed on the heat emitting resistance body; a reference electrode formed in an upper central region of the second insulation film; a solid electrolyte formed on the reference electrode; and a detection electrode formed on the solid electrolyte.

Abstract: Disclosed are an MEMS type semiconductor gas sensor using a microheater having many holes and a method for manufacturing the same. The MEMS type semiconductor gas sensor includes: a substrate of which a central region is etched with a predetermined thickness; a second membrane formed at an upper portion of the central region of the substrate and having many holes; a heat emitting resistor formed on the second membrane and having many holes; a first membrane formed on the second membrane including the heat emitting resistor and having many holes; a sensing electrode formed on the first membrane and having many holes; and a sensing material formed on the sensing electrode.