Abstract: An integrated circuit device includes a lower electrode, an upper electrode, and a dielectric layer structure between the lower electrode and the upper electrode, the dielectric layer structure including a first surface facing the lower electrode and a second surface facing the upper electrode. The dielectric layer structure includes a first dielectric layer including a first dielectric material and a plurality of grains extending from the first surface to the second surface and a second dielectric layer including a second dielectric material and surrounding a portion of a sidewall of each of the plurality of grains of the first dielectric layer in a level lower than the second surface. The second dielectric material includes a material having bandgap energy which is higher than bandgap energy of the first dielectric material.

Abstract: Provided is an optical alignment apparatus and method that can enhance the efficiency of optical alignment by using a light source for generating light of a visible wavelength range and lensed fiber and perform optical alignment quickly, precisely and economically. The optical alignment apparatus of the present research includes: a first light source for providing light of a visible wavelength range to perform optical alignment; a second light source providing light of an infrared wavelength range; a micrometer stage for aligning the light outputted from the first light source or the second light source with an active area of a detector; lensed fiber for inputting light into the active area of the detector; an optical alignment confirming means for visually confirming whether the light outputted from the lensed fiber is aligned with the active area of the detector; an image information acquiring means for acquiring image information; and a control means for operating the micrometer stage.

Abstract: Provided is an optical alignment apparatus and method that can enhance the efficiency of optical alignment by using a light source for generating light of a visible wavelength range and lensed fiber and perform optical alignment quickly, precisely and economically. The optical alignment apparatus of the present research includes: a first light source for providing light of a visible wavelength range to perform optical alignment; a second light source providing light of an infrared wavelength range; a micrometer stage for aligning the light outputted from the first light source or the second light source with an active area of a detector; lensed fiber for inputting light into the active area of the detector; an optical alignment confirming means for visually confirming whether the light outputted from the lensed fiber is aligned with the active area of the detector; an image information acquiring means for acquiring image information; and a control means for operating the micrometer stage.