Patents by Inventor Hyung-Sup Youn

Hyung-Sup Youn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for making T-gate of field effect transistor
    Patent number: 5693548
    Abstract: A method for making a T-shaped gate of a field effect transistor is disclosed. The method includes the steps of sequentially depositing first and second photoresist layers on a semiconductor substrate and performing an exposure using electron beams having different energy, one of the electron beams having a first energy to lightly expose only the second photoresist layer and the other of the electron beams having a second energy to lightly expose all of the first and second layers. The invention reduces gate resistance and parasitic capacitance of the T-shaped gate.
    Type: Grant
    Filed: December 19, 1994
    Date of Patent: December 2, 1997
    Assignee: Electronics and Telecommunications Research Institute
    Inventors: Jin-Hee Lee, Sang-Soo Choi, Hyung-Sup Youn, Chul-Soon Park, Hyung-Jun Yoo, Hyung-Moo Park