Patents by Inventor Hyunjoon BANG

Hyunjoon BANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma purge method
    Patent number: 11725276
    Abstract: A plasma purge method that is performed after dry cleaning in a process container and before applying a deposition process to a substrate includes: (a) activating and supplying a first process gas containing Cl2 in the process container; and (b) activating and supplying a second process gas containing H2 and O2 in the process container.
    Type: Grant
    Filed: September 15, 2021
    Date of Patent: August 15, 2023
    Assignee: Tokyo Electron Limited
    Inventors: Hideomi Hane, Hyunjoon Bang, Noriaki Fukiage
  • PLASMA PURGE METHOD
    Publication number: 20220081764
    Abstract: A plasma purge method that is performed after dry cleaning in a process container and before applying a deposition process to a substrate includes: (a) activating and supplying a first process gas containing Cl2 in the process container; and (b) activating and supplying a second process gas containing H2 and O2 in the process container.
    Type: Application
    Filed: September 15, 2021
    Publication date: March 17, 2022
    Inventors: Hideomi HANE, Hyunjoon BANG, Noriaki FUKIAGE
  • PLASMA PURGE METHOD
    Publication number: 20220081766
    Abstract: A plasma purge method that is performed after dry cleaning in a process container and before applying a deposition process to a substrate includes: (a) activating and supplying a first process gas containing N2 in the process container; and (b) activating and supplying a second process gas containing H2 and O2 in the process container.
    Type: Application
    Filed: September 15, 2021
    Publication date: March 17, 2022
    Inventors: Hideomi HANE, Hyunjoon BANG, Noriaki FUKIAGE