Abstract: A method of depositing an atomic layer is provided. The method includes a plurality of deposition cycles. Each of the plurality of deposition cycles includes rotating a valve plate included in an exhaust port by a first angle while supplying a precursor to a chamber into which a substrate is loaded, rotating the valve plate by a second angle while supplying a purge gas to the chamber, rotating the valve plate by a third angle while supplying a reactor to the chamber, and rotating the valve plate by the second angle while supplying the purge gas to the chamber, and wherein the first angle, the second angle, and the third angle are certain angles between an upper surface of the valve plate and a virtual plane vertical to an internal path of the exhaust port, and the first angle differs from the third angle.

Abstract: Included may be a crankshaftless internal combustion engine, including a power shaft unit in which a transferring path of a power system may be selected depending on a deactivated state and an activated state of a cylinder, a cylinder separator separating a power system of the deactivated cylinder from the power shaft unit by control of an ECU operated by a deactivated cylinder and an activated cylinder, and a compression changing unit varying a compression ratio of the activated cylinder in multistage.

Abstract: Included may be a crankshaftless internal combustion engine, including a power shaft unit in which a transferring path of a power system may be selected depending on a deactivated state and an activated state of a cylinder, a cylinder separator separating a power system of the deactivated cylinder from the power shaft unit by control of an ECU operated by a deactivated cylinder and an activated cylinder, and a compression changing unit varying a compression ratio of the activated cylinder in multistage.

Abstract: A crankshaftless internal combustion engine includes a power shaft unit in which a transferring path of a power system is selected depending on a deactivated state and an activated state of a cylinder and a cylinder separator separating a power system of the deactivated cylinder from the power shaft unit by control of an ECU, thereby improving fuel efficiency due to a uniform change in volume of a combustion chamber of the cylinder and increasing reduction in Nox of exhaust gas, and particularly, a plurality of cylinders are controlled in a variable cylinder scheme to further improve fuel efficiency and be optimal to even EM improvement.