Patents by Inventor I Cheng Tseng

I Cheng Tseng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Critical dimension control in a semiconductor fabrication process
    Patent number: 7306746
    Abstract: A method for controlling a critical dimension in an etched structure comprises the steps of: forming a hard mask above a substrate, measuring a critical dimension of the hard mask, and using the measured hard mask critical dimension to control a critical dimension trim operation performed on a circuit trace above the substrate.
    Type: Grant
    Filed: January 30, 2004
    Date of Patent: December 11, 2007
    Assignee: Taiwan Semiconductor Manufacturing Co. Ltd.
    Inventors: Fang-Cheng Chen, Li Te Hsu, I Cheng Tseng, Hsu Chiung Wen, Tsung Chuan Chen, Pin Chia Su