Patents by Inventor I-Chun Eugenia Liu

I-Chun Eugenia Liu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for distributing gases in a chemical vapor deposition system
    Patent number: 6495233
    Abstract: A lid assembly for a semiconductor processing apparatus having at least two chambers comprises a lid plate having a first side and a second side and a plasma generation source mounted to the first side of the lid plate. Additionally, at least two gas boxes are coupled to the first side of the lid of the lid plate, and a divider is coupled between the plasma generation source and the at least two gas boxes.
    Type: Grant
    Filed: July 5, 2000
    Date of Patent: December 17, 2002
    Assignee: Applied Materials, Inc.
    Inventors: Inna Shmurun, Scott Hendrickson, Gwendolyn Jones, Shankar Venkataraman, Son T. Nguyen, I-Chun Eugenia Liu