Patents by Inventor I-Hui Chang

I-Hui Chang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Photoresist management system
    Patent number: 7451935
    Abstract: The present disclosure provides a system and method for managing photoresist fabrication. In one example, the system includes a holder that can removably receive a chemical container. The system includes chemical supply structure associated with the holder and adapted to be coupled to a processing module, wherein when a chemical container is removably disposed in the holder the chemical supply structure can carry a chemical away from the chemical container. The system includes an identification (ID) reader associated with the holder, wherein when a chemical container is removably disposed in the holder the ID reader automatically communicates with a container ID unit associated with the chemical container. The system includes a control module coupled to the ID reader and adapted to be coupled to a processing module.
    Type: Grant
    Filed: July 12, 2005
    Date of Patent: November 18, 2008
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: I-Hui Chang
  • Photoresist management system
    Publication number: 20060255138
    Abstract: The present disclosure provides a system and method for managing photoresist fabrication. In one example, the system includes a holder that can removably receive a chemical container. The system includes chemical supply structure associated with the holder and adapted to be coupled to a processing module, wherein when a chemical container is removably disposed in the holder the chemical supply structure can carry a chemical away from the chemical container. The system includes an identification (ID) reader associated with the holder, wherein when a chemical container is removably disposed in the holder the ID reader automatically communicates with a container ID unit associated with the chemical container. The system includes a control module coupled to the ID reader and adapted to be coupled to a processing module.
    Type: Application
    Filed: July 12, 2005
    Publication date: November 16, 2006
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventor: I-Hui Chang