Abstract: The disclosure provides a compensating design method for a shadow mask including: providing a first shadow mask having a first opening pattern and a first material pattern; disposing the first shadow mask on a substrate having a predetermined depositing film area with first and second sides; performing a deposition process by using the first shadow mask as a mask to form a film on an actual depositing film area, wherein the distance between the first and the third sides is a first bias, and the distance between the second and the fourth sides is a second bias, and a single side gray zone of the actual depositing film area relative to the predetermined depositing film area is substantially half of the sum of the first and the second biases; and designing a second shadow mask according to the single side gray zone.

Abstract: A cassette for holding substrate in a load-lock comprising an outer casing having a front surface with multiple slots and two sidewalls having holes at the bottom section thereof. Braces are set at the corner edges inside the outer casing and side plates are attached to the braces. Each slot has a set of side plates attached to the braces for holding a substrate. Obstruction pieces are also set inside the outer casing near the corresponding holes. Each obstruction pieces comprise a fixed part and an obstructing part. The fixed part attaches firmly to a bottom plate of the outer casing, and the obstructing part blocks the corresponding hole on the outer casing.

Abstract: A cassette for holding substrate in a load-lock comprising an outer casing having a front surface with multiple slots and two sidewalls having holes at the bottom section thereof is provided. Braces are set at the corner edges inside the outer casing and side plates are attached to the braces. Each slot has a set of side plates attached to the braces for holding a substrate. Obstruction pieces are also set inside the outer casing near the corresponding holes. Each obstruction pieces comprise a fixed part and an obstructing part. The fixed part attaches firmly to a bottom plate of the outer casing, and the obstructing part blocks the corresponding hole on the outer casing.

Abstract: A cassette for holding substrate in a load-lock comprising an outer casing having a front surface with multiple slots and two sidewalls having holes at the bottom section thereof. Braces are set at the corner edges inside the outer casing and side plates are attached to the braces. Each slot has a set of side plates attached to the braces for holding a substrate. Obstruction pieces are also set inside the outer casing near the corresponding holes. Each obstruction pieces comprise a fixed part and an obstructing part. The fixed part attaches firmly to a bottom plate of the outer casing, and the obstructing part blocks the corresponding hole on the outer casing.