Patents by Inventor I Te CHO

I Te CHO has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Wafer Edge Protector
    Publication number: 20140283991
    Abstract: A wafer edge protector is used in an inductively coupled plasma reactive ion etching instrument for the manufacturing of GaN semiconductor devices and circuits. The wafer edge protector comprises a ring clamp, which has a first inner diameter and a second inner diameter, and the ring clamp covers the edges of a wafer and a wafer carrier to clamp the wafer and the wafer carrier and to prevent damage on the edges of the wafer and the wafer carrier during the etching process.
    Type: Application
    Filed: March 20, 2013
    Publication date: September 25, 2014
    Applicant: WIN Semiconductors Corp.
    Inventors: Chia-Hao CHEN, Yi-Feng WEI, Yao-Chung HSIEH, I Te CHO, Walter Tony WOHLMUTH