Patents by Inventor I Tseng

I Tseng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Critical dimension control in a semiconductor fabrication process
    Publication number: 20050167397
    Abstract: A method for controlling a critical dimension in an etched structure comprises the steps of: forming a hard mask above a substrate, measuring a critical dimension of the hard mask, and using the measured hard mask critical dimension to control a critical dimension trim operation performed on a circuit trace above the substrate.
    Type: Application
    Filed: January 30, 2004
    Publication date: August 4, 2005
    Inventors: Fang-Cheng Chen, Li Hsu, I Tseng, Hsu Wen, Tsung Chen, Pin Su