Abstract: Epitaxial source/drain structures for enhancing performance of multigate devices, such as fin-like field-effect transistors (FETs) or gate-all-around (GAA) FETs, and methods of fabricating the epitaxial source/drain structures, are disclosed herein. An exemplary device includes a dielectric substrate. The device further includes a channel layer, a gate disposed over the channel layer, and an epitaxial source/drain structure disposed adjacent to the channel layer. The channel layer, the gate, and the epitaxial source/drain structure are disposed over the dielectric substrate. The epitaxial source/drain structure includes an inner portion having a first dopant concentration and an outer portion having a second dopant concentration that is less than the first dopant concentration. The inner portion physically contacts the dielectric substrate, and the outer portion is disposed between the inner portion and the channel layer. In some embodiments, the outer portion physically contacts the dielectric substrate.

Abstract: The disclosure provides a silicon-based suspending antenna with photonic bandgap structure, which includes a silicon substrate, an electrode layer, a spacing part and an F-shaped structure. The silicon substrate has a first side surface and a second side surface oppositing to the first surface. The electrode layer has a flat part, a first base and at least one second base, in which one side of the flat part has a notch, the first base, the second base and the notch are separately disposed on the second side surface and essentially parallel to the longitudinal edge of the second side surface, the first base has a main body and an extension, and the extension extends from the main body and into the notch. The F-shaped structure has a longitudinal part disposed on the spacing part and is parallel to the second side surface.

Abstract: A manufacturing method for a Zinc Oxide (ZnO) piezoelectric thin-film with high C-axis orientation comprises the steps of providing a substrate having a base, a SiO2 layer and a Si3N4 layer; forming a bottom electrode layer on the Si3N4 layer; patterning the bottom electrode layer; sputtering a Zinc Oxide layer on the Si3N4 layer and the bottom electrode layer; forming a photoresist layer on the Si3N4 layer and the Zinc Oxide layer; patterning the photoresist layer to reveal the Zinc Oxide layer; forming a top electrode layer on the Zinc Oxide layer and the photoresist layer; removing the photoresist layer and the top electrode layer formed on the photoresist layer, and the top electrode layer formed on the Zinc Oxide layer can be remained; and patterning the Si3N4 layer to form a recess that reveals the base of the substrate.

Abstract: A portable detection system for allergic diseases includes a filtration-based inspection module and a reader module. The filtration-based inspection module includes an FPW sensor and a liquid sample filtration apparatus, wherein the liquid sample filtration apparatus includes an injection opening, a passage module, a filtering membrane and a gathering aperture. The injection opening is in communication with the gathering aperture. The FPW sensor comprises a frame body, a carrier and a sensing chip having an accommodating slot in communication with the gathering aperture. The carrier comprises a plurality of conductive terminals, and the conductive terminals are electrically connected with the sensing chip. The reader module comprises a connection slot capable of being inserted by the conductive terminals of the carrier.

Abstract: The present disclosure utilizes the MEMS (Micro Electro Mechanical Systems) process and packaging method to produce a microsystem for analyzing blood which is capable of detecting several kinds of ions. The microsystem for analyzing blood has a miniaturized reference electrode, so size of the microsystem can be greatly reduced. The microsystem further has a gate detecting area larger than a conventional planar ISE or a conventional ISFET does, so interference with signals can be avoided, and packaging difficulty and blood leakage can be reduced. Therefore, the microsystem is thin and small, reacts rapidly, and has a high accuracy, and a high compatibility with IC (integrated circuit) process. In addition, the microsystem has high stability of long-term potential, low offset-potential characteristics, low alternating current impedance, high stability of dynamic reference potential, low electrochemical noises and high reproducibility of the electrode.

Abstract: A portable detection system for allergic diseases includes a filtration-based inspection module and a reader module. The filtration-based inspection module includes an FPW sensor and a liquid sample filtration apparatus, wherein the liquid sample filtration apparatus includes an injection opening, a passage module, a filtering membrane and a gathering aperture. The injection opening is in communication with the gathering aperture. The FPW sensor comprises a frame body, a carrier and a sensing chip having an accommodating slot in communication with the gathering aperture. The carrier comprises a plurality of conductive terminals, and the conductive terminals are electrically connected with the sensing chip. The reader module comprises a connection slot capable of being inserted by the conductive terminals of the carrier.

Abstract: A frequency shift detector includes a digital control unit, a digital/analog converter, a reagent concentration detecting circuit and a frequency difference generator, wherein the digital control unit includes a control circuit and a direct digital frequency synthesizer electrically connected with the control circuit, and the control circuit comprises a reset terminal and a pulse input terminal. The digital control unit proceeds with accurate concentration detection for various samples borne on the reagent concentration detecting circuit.

Abstract: The disclosure provides a silicon-based suspending antenna with photonic bandgap structure which manufactured by IC thin film process, surface micromachining and bulk Micromachining are provided. The silicon-based suspending antenna with photonic bandgap structure includes a silicon substrate, an electrode layer, a spacing part and an F-shaped structure. The silicon substrate has a first side surface and a second side surface oppositing to the first surface, the first side surface has a plurality of regular recesses and the second side surface has a longitudinal edge. The electrode layer has a flat part, a first base and at least one second base, in which one side of the flat part has a notch, the first base, the second base and the notch are separately disposed on the second side surface and essentially parallel to the longitudinal edge of the second side surface, the first base has a main body and an extension, and the extension extends from the main body and into the notch.

Abstract: The present disclosure utilizes the MEMS (Micro Electro Mechanical Systems) process and packaging method to produce a microsystem for analyzing blood which is capable of detecting several kinds of ions. The microsystem for analyzing blood has a miniaturized reference electrode, so size of the microsystem can be greatly reduced. The microsystem further has a gate detecting area larger than a conventional planar ISE or a conventional ISFET does, so interference with signals can be avoided, and packaging difficulty and blood leakage can be reduced. Therefore, the microsystem is thin and small, reacts rapidly, and has a high accuracy, and a high compatibility with IC (integrated circuit) process. In addition, the microsystem has high stability of long-term potential, low offset-potential characteristics, low alternating current impedance, high stability of dynamic reference potential, low electrochemical noises and high reproducibility of the electrode.

Abstract: A manufacturing method for a Zinc Oxide (ZnO) piezoelectric thin-film with high C-axis orientation comprises the steps of providing a substrate having a base, a SiO2 layer and a Si3N4 layer; forming a bottom electrode layer on the Si3N4 layer; patterning the bottom electrode layer; sputtering a Zinc Oxide layer on the Si3N4 layer and the bottom electrode layer; forming a photoresist layer on the Si3N4 layer and the Zinc Oxide layer; patterning the photoresist layer to reveal the Zinc Oxide layer; forming a top electrode layer on the Zinc Oxide layer and the photoresist layer; removing the photoresist layer and the top electrode layer formed on the photoresist layer, and the top electrode layer formed on the Zinc Oxide layer can be remained; and patterning the Si3N4 layer to form a recess that reveals the base of the substrate.

Abstract: A self-assembly micro fan includes a body, a plurality of blades and flexible joints, with any one of the blades being connected to the body by one of the flexible joints while each flexible joint is regarded as a pivot to move the blade connected therewith to have an angle relative to a radial direction of the body. Besides, each of the flexible joints has plural link members or at least one link member and extension member to provide variable types of shape of the micro fans, so that the air driving efficiency of the self-assembly micro fan is improved.

Abstract: The present invention relates to a micro motor including a hub, a rib structure, an inner ring, an outer ring and at least two micro actuators, in which a top edge of the hub is projected outwardly to form a top lid, a plurality of bumps are provided between the rib structure and the top lid, and protruded limiting parts are disposed between the wall of the inner hole of the rib structure and the outer periphery of the hub so that the rib structure is in point contact with the hub and the top lid. Therefore, when the micro actuators drive the rib structure, the inner ring and the outer ring to rotate, mutual abrasion among those parts can be reduced to prolong the lifespan of the micro motor.

Abstract: A micro-motor includes a base, a rotor and a retaining member. The base includes an axle tube. The rotor includes a rotary member and a support member arranged between the rotary member and the base. The rotary member has a central hole where the axle tube of the base extends. The retaining member is mounted on the base and surrounds the rotor. One end of the retaining member, which doesn't couple to the base, extends towards the axle tube to form a retaining portion. The retaining portion is within a rotational area of the rotor in an axial direction of the axle tube. The rotor is arranged between the retaining portion and the base. Accordingly, the retaining member can retain the rotor to prevent departure of the rotor from the axle tube of the base and the central structure of the micro-motor is effectively simplified.

Abstract: The present invention relates to a linear micro motor having an forward and backward reciprocating motion. The linear micro motor includes at least two actuators which can be a scratch drive actuator (SDA), a bounce drive actuator (BDA) or a combination thereof. To achieve the reciprocating motion, the linear micro motor is arranged in a way that at least two SDAs are disposed in an opposite manner, at least two BDAs are disposed in an opposite manner, or at least a SDA and at least a BDA are disposed in an identical manner. The linear micro motor of the present invention in accordance with the arrangement of the actuators can be realized to be applicable to a digital camera or camera phone by the advancing and receding linear motion caused by the motion of the actuators to achieve a focus-adjustable liquid crystal lens.

Abstract: The present invention relates to a linear micro motor having an forward and backward reciprocating motion. The linear micro motor includes at least two actuators which can be a scratch drive actuator (SDA), a bounce drive actuator (BDA) or a combination thereof. To achieve the reciprocating motion, the linear micro motor is arranged in a way that at least two SDAs are disposed in an opposite manner, at least two BDAs are disposed in an opposite manner, or at least a SDA and at least a BDA are disposed in an identical manner. The linear micro motor of the present invention in accordance with the arrangement of the actuators can be realized to be applicable to a digital camera or camera phone by the advancing and receding linear motion caused by the motion of the actuators to achieve a focus-adjustable liquid crystal lens.

Abstract: The present invention relates to a micro motor including a hub, a rib structure, an inner ring, an outer ring and at least two micro actuators, in which a top edge of the hub is projected outwardly to form a top lid, a plurality of bumps are provided between the rib structure and the top lid, and protruded limiting parts are disposed between the wall of the inner hole of the rib structure and the outer periphery of the hub so that the rib structure is in point contact with the hub and the top lid. Therefore, when the micro actuators drive the rib structure, the inner ring and the outer ring to rotate, mutual abrasion among those parts can be reduced to prolong the lifespan of the micro motor.

Abstract: A self-assembly micro fan includes a body, a plurality of blades and flexible joints, with any one of the blades being connected to the body by one of the flexible joints while each flexible joint is regarded as a pivot to move the blade connected therewith to have an angle relative to a radial direction of the body. Besides, each of the flexible joints has plural link members or at least one link member and extension member to provide variable types of shape of the micro fans, so that the air driving efficiency of the self-assembly micro fan is improved.

Abstract: The present invention relates to a self-assembly micro blade applied to a micro fan. The micro fan combines at least a self-assembly micro blade and a motor using an actuator as the main body of the micro fan. The self-assembly micro blade includes at least a movable part of a microstructure, at least an elastic joint provided between an outer ring of the micro fan and the movable part. The elastic joint is composed of a polyimide film, which is heated to contract and generate surface tension by using a reflow process so as to lift up the movable part of the microstructure; moreover, the movable part is bent in a curved form through the elastic link exhibits a multi-layer shape by serially connecting at least two movable parts so as to complete the self assembly of the micro blade, thereby increasing air flow rate and improving air flow length.

Abstract: The present invention relates to a micro motor structure, which includes a hub, a rib structure, an inner ring, an outer ring and at least two micro actuators in which a top edge of the hub is projected outwards to form an upper lid having at least two protrusions in form of rectangular tooth, triangle or arc so that the upper lid is in point contact with the inner wall of the inner ring. As such, in spite of collision between the inner ring and the upper lid, when the micro actuators drive the rib structure, the inner ring and the outer ring to rotate, mutual abrasion between the upper lid and the inner ring is alleviated due to the point contact therebetween, thereby prolonging the lifespan of the micro motor.

Abstract: The invention relates to a self-assembly microstructure with a polyimide thin-film elastic joint, which contains at least one stationary part of the microstructure and at least one movable part of the microstructure. An elastic joint located between the stationary part and the movable part is a photosensitive polyimide thin film material. The polyimide elastic joint is contracted after high-temperature reflow process. The surface tension force of cured polyimide can rotate and lift-up the movable part of the microstructure in completion of the self-assembly of the microstructure.