Patents by Inventor Ian G. Sullivan

Ian G. Sullivan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Chemical mechanical planarization of metal substrates
    Patent number: 6602436
    Abstract: A method of polishing a wafer in a carrier by a polishing pad, controlling a ratio of platen speed to carrier speed (PS to CS) within a specific range, or controlling a first polishing step with a PS to CS ratio in the range of about 150:1 to about 1:150 followed by a second polishing step with a platen speed of about 0 to 20 rpm while maintaining the carrier speed used in the first polishing step, which maximizes clearing of residual material removed from a patterned wafer surface by polishing.
    Type: Grant
    Filed: August 9, 2001
    Date of Patent: August 5, 2003
    Assignee: Rodel Holdings, Inc
    Inventors: Glenn C. Mandigo, Ross E. Barker, II, Craig D. Lack, Ian G. Sullivan, Wendy B. Goldberg
  • Chemical mechanical planarization of metal substrates
    Publication number: 20020058426
    Abstract: A method of polishing a wafer in a carrier by a polishing pad, controlling a ratio of platen speed to carrier speed (PS to CS) within a specific range, or controlling a first polishing step with a PS to CS ratio in the range of about 150:1 to about 1:150 followed by a second polishing step with a platen speed of about 0 to 20 rpm while maintaining the carrier speed used in the first polishing step, which maximizes clearing of residual material removed from a patterned wafer surface by polishing.
    Type: Application
    Filed: August 9, 2001
    Publication date: May 16, 2002
    Inventors: Glenn C. Mandigo, Ross E. Barker, Craig D. Lack, Ian G. Sullivan, Wendy B. Goldberg