Abstract: An arrangement of two shutters radially outward from an injector block and a susceptor onto which a wafer carrier is removably mounted are configured to provide a flowpath through a reactor chamber that does not exhibit a vortex, thereby reducing or eliminating buildup on the inside of the reactor chamber and facilitating large temperature gradient between the injector block and the wafer carrier. This can be accomplished by introduction of a purge gas flow at a radially inner wall of an upper shutter, and in some embodiments the purge gas can have a different chemical composition than the precursor gas used to grow desired epitaxial structures on the wafer carrier.

Abstract: An injector block for supplying one or more reactant gases into a chemical vapor deposition reactor. The injector block including a plurality of first reactant gas distribution channels between one or more first reactant gas inlets and a plurality of first reactant gas distribution outlets to deliver a first reactant gas into the reactor, and a plurality of second reactant gas distribution channels between one or more second reactant gas inlets and a plurality of second reactant gas distribution outlets to deliver a second reactant gas into the reactor, the plurality of second reactant gas distribution outlets partitioned into at least a second reactant gas first zone and a second reactant gas second zone, the second reactant gas second zone at least partially surrounding the second reactant gas first zone.

Abstract: A seal having a cross-sectional profile that includes a first lobe, a second lobe, and a corner having an angle between 45 and 90 degrees, inclusive, a first side extending from the first lobe to the corner and a second side extending from the second lobe to the corner, where the first side and the second side define the corner angle. The seal can be seated in a groove so that the first lobe and the corner are in the groove and the second lobe extends from the groove. In use, the second lobe folds into the groove to form a fluid-tight seal.

Abstract: A seal having a cross-sectional profile that includes a first lobe, a second lobe, and a corner having an angle between 45 and 90 degrees, inclusive, a first side extending from the first lobe to the corner and a second side extending from the second lobe to the corner, where the first side and the second side define the corner angle. The seal can be seated in a groove so that the first lobe and the corner are in the groove and the second lobe extends from the groove. In use, the second lobe folds into the groove to form a fluid-tight seal.

Abstract: An arrangement of two shutters radially outward from an injector block and a susceptor onto which a wafer carrier is removably mounted are configured to provide a flowpath through a reactor chamber that does not exhibit a vortex, thereby reducing or eliminating buildup on the inside of the reactor chamber and facilitating large temperature gradient between the injector block and the wafer carrier. This can be accomplished by introduction of a purge gas flow at a radially inner wall of an upper shutter, and in some embodiments the purge gas can have a different chemical composition than the precursor gas used to grow desired epitaxial structures on the wafer carrier.

Abstract: A platform balance includes a first frame support and a second frame support movable relative to the first frame support. At least one counter balance assembly is provided to support the static weight of the first frames support and elements connected thereto. The counterbalance assembly includes a beam and a pivot assembly allowing the beam to pivot. A weight is selectively positionable on the beam. A compliant assembly is supported by the beam on a portion thereof on a side of the pivot assembly opposite the weight. The compliant assembly supports the first frame support. The compliant assembly includes a second pivot assembly and a planar motion assembly coupled to the second pivot assembly.

Abstract: The present disclosure is directed to a platform balance that is suitable for transmitting forces and moments in a plurality of directions. The platform balance is adapted to support a test specimen, such as a large vehicle, in a test environment such as a wind tunnel. The platform balance includes a frame support and at least three spaced-apart transducers coupled to the frame support. Each of the transducers is sensitive about two orthogonal sensed axes. The transducers cooperate to provide signals indicative of forces and moments with respect to at least two orthogonal axes. Each transducer includes a transducer body having a support coupled to a sensor body along an axis of compliance. The sensor body is adapted to deflect about the two orthogonal sensed axes where the sensed axes are mutually orthogonal to the axis of compliance.

Abstract: The present disclosure is directed to a platform balance that is suitable for transmitting forces and moments in a plurality of directions. The platform balance is adapted to support a test specimen, such as a large vehicle, in a test environment such as a wind tunnel. The platform balance includes a frame support and at least three spaced-apart transducers coupled to the frame support. Each of the transducers is sensitive about two orthogonal sensed axes. The transducers cooperate to provide signals indicative of forces and moments with respect to at least two orthogonal axes. Each transducer includes a transducer body having a support coupled to a sensor body along an axis of compliance. The sensor body is adapted to deflect about the two orthogonal sensed axes where the sensed axes are mutually orthogonal to the axis of compliance.