Patents by Inventor Ian M. Liles

Ian M. Liles has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fabricating electrical contacts in semiconductor devices
    Patent number: 5449640
    Abstract: A method of fabricating an electrical contact in a semiconductor device comprises providing on an underlying silicon substrate a reflowable interlevel dielectric material having a contact opening exposing a contact region of the silicon substrate. The silicon substrate and the interlevel dielectric material are heated by a rapid thermal anneal in an oxygen-containing atmosphere thereby to grow an oxide control layer in the contact region and to reflow the dielectric material. A layer of transition metal is deposited over the reflowed dielectric material and the control layer and at least part of the transition metal layer is converted into a metallurgic barrier.
    Type: Grant
    Filed: July 19, 1991
    Date of Patent: September 12, 1995
    Assignee: INMOS Limited
    Inventors: Paul A. Hunt, Ian M. Liles, David R. Guite